1: (a) Scanning Electron Microscope (SEM) image of Film Bulk Acoustic Wave Resonator (FBAR)
1: (b) experimentally measured performance using Vector Network Analyzer (VNA)
2: (a) Released array of piezoelectric micro-cantilevers with grid lines
2: (b) Top view of 300μm×60μm cantilever
2: (c) Top view of five cantilevers
2: (d) Tilted view of releases cantilevers array
3: (a) Image of 3-inch diameter released wafer along with diced dies
3: (b) The released micro-cantilever size was 580µm×180µm was analysed using scanning electron microscope
4: (a) Wafer-scale (3-inch) magetoelectric based MEMS magnetic field sensors fabricated at CSIR-CEERI Pilani
4: (b) Packaged magnetic sensor
4: (c) Mechanical resonance frequency measured using Laser Doppler Vibrometer (LDV)
4: (d) Sensing performance
5: (a) Image of Ku band band-pass filter,
5: (b) experimentally measured performance using Vector Network Analyzer (VNA)
6: (a) Optical microscope image of fabricated MEMS Micro-Thermal Flow Sensor chip.
6: (b) Thermal image of micro-heater at voltage applied 0.8 V and draw current 13 mA.
6: (c) MEMS Micro-Thermal Flow Sensor chip mounted on PCB which is placed in the sensor housing for oxygen flow measurement.
6: (d) Sensitivity response of MEMS Micro-Thermal Flow Sensor module. Input flow is provided in SCCM and output signal is measured in the mV range.
