
SDS3-Reactive Co-Sputtering System
Manufacturer: VST, IsraelMFD: 2010-12-01Model: N/ASpecs: Magnetic Thin film and their nano composites ( Fe-Ni, Co-Zr)
Sputtering source 700W DC
800W RF
Operating pressure 1 to 50 mTorr
Target Diameter 3”
Substrate Temp. 25˚C to 250 ˚C
Best vacuum 2x10-7 Torr
Charges: For Industry - 17000 /- INR Per Sample
For Student - 8500 /- INR Per Sample
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