Manufacturer: Suess Microtech Germany
MFD: 2011-09-01
Model: N/A
Specs: TSA + BSA alignment up to 4" diameter wafer and NIL attachement
Wafer size - 2” to 6” Diameter
Mask size - up to 7”x7”
Resolution - 0.5μm
Alignment Accuracy - 0.5μm
UV-NIL attachment for Nano scale features

Charges: For Industry - 10,000/- INR Per Sample
For Student - 5,000/- INR Per Sample
*These are standard charges. Actual charges may vary as per job requirement.
Contacts: N/A

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