DF4-Oxidation Diffusion

Manufacturer: DF4-Oxidation diffusion(MEMS)
MFD: 2005-02-01
Model: N/A
Specs: THERMAL OXIDATION, PHOSPHOROUS DIFFUSION, METAL SINTERING
Six-Stack Oxidation and Diffusion Furnace meant of 10 no. of 6" silicon wafer processing for the following work-
1. Dry and Wet Oxidation
2. Boron Deposition by BBr3/Boron Nitride
3. Boron Drive-in
4. Phosphorous Deposition by POCl3
5. Phosphorous Drive-in
6. Aluminum Sintering

Charges: For Industry - 17,150/- INR Per Sample
For Student - 8,575/- INR Per Sample
*These are standard charges. Actual charges may vary as per job requirement.
Contacts: N/A