MEMS Microfluidic Platform
Fluid-FET: The Fluidic-Field Effect Transistor (Fluid-FET) has a nano-dimensional fluidic channel, connecting two fluid reservoirs and is capped with high-quality thermal SiO2 (i.e. low surface charges compared to PECVD SiO2) which is used as gate oxide; analogous to a channel between source-drain of a conventional Field Effect Transistor (FET). The ionic conductance modulation in the range [...]