MEMS Pressure Sensor

A pressure sensor for Micro Air Vehicle (MAV) application was developed. The pressure sensor structure consists of four diffused polysilicon piezoresistors placed on a diaphragm fabricated by bulk micromachining and connected in Wheatstone bridge. Pressure sensors are fabricated for a pressure range of 0-1.1 bar and the meander shaped piezoresistors are placed at optimized highstress regions. The optical images of the fabricated device are shown in Fig. 1. The characterisation of the pressure sensor is in progress.

 

Fig. 1: Optical image of fabricated pressure sensor chip