Smart Sensors

Transducers and Actuators

2017

  • Anuradha Purohit, S. Chander, S.L. Patel, K.J. Rangra, M.S. Dhaka, “Substrate dependent physical properties of evaporated CdO thin films for optoelectronic applications”, Physics Letters A381 (March 2017) 1910–1914
  • Raju Patel, Anuroop, D Boolchandani, Kamaljit Rangra, “Design and Simulation of 1.4 GHz Film Bulk Acoustic Resonator for RF Filter Applications”, 4thInternational Conference on Computing for Sustainable Global Development (INDIACom-2017), at BVICAM, New Delhi (INDIA), March 1-3, 2017.
  • Raju Patel, Manish K Patel, D. Boolchandani, Kamaljit Rangra, “FEM Modeling of Solidary Mounted FBAR and Gas sensor using PIB sensitive layer”, Journal of Micro/Nanolithography, MEMS, and MOEMS, April 25, 2017. Accepted
  • Manish Kumar Gupta, R K Khanna, K J Rangra, Y K Vijay, , “Effect of Cell Phone Radiations on Electrochemical Transmission in Nervous System”, 4th International Conference on Power, Control and Embedded Systems (ICPCES – 2017), Motilal Nehru National Institute of Technology Allahabad, India9-11 , March, 2017
  • Manish Kumar Gupta, R K Khanna, K J Rangra, “Effect of External EM Signals on Nerve Conduction”,7th IEEE International Advance Computing Conference (IACC-2017) VNR Vignana Jyothi Institute of Engineering and Technology, Hyderabad, India, January 5-7, 2017
  • Manish Gupta, R K Khanna, K J Rangra “Study of effect of non-ionizing external em-field on nerve conduction”, Accepted for publication in Advanced Science, Engineering and Medicine, (A Journal of American Scientific Publishers, USA), (SCOPUS) January 2017
  • Manish Kr. Gupta, R K Khanna, K J Rangra, Y K VIjay “Interaction of cell phone radiations on electrochemical transmission in nervous system ”, Accepted for publication in Springer– Advances in Intelligent Systems and Computing (SCOPUS). February 2017
  • Manish Kr. Gupta, R K Khanna, K J Rangra “Measurement of Penetrated Electric Field Due to External RF EM Pollution in Human Skin Tissue” National conference on “Innovative Trends in Physics and Futuristic Engineering- Vision 2030 (ITPFE-2017), Bikaner, 20-21 Jan. 2017.
  • Surender P. Gaur, Prateek Kothari, K. Maninder, Prem Kumar, Kamaljit Rangra and Dinesh Kumar, “Development and Integration of Near atmospheric N2 ambient sputtered Au thin films form enhanced infrared absorption”, Infrared Physics and Technology, 82(2017), 154-160, doi:10.1016/j. infrared. 2017.03.013.

2016

  • Raju Patel, Vimal Agrawal, D. Boolchandani and K.J. Rangra, “Design of MEMS based film bulk acoustic wave resonator”, International conference on recent trends in engineering and material sciences (ICEMS-2016) at JNU, Jaipur, March 17-19, 2016.
  • Raju Patel, Manish Kumar Patel, D. Boolchandani and K.J. Rangra, “Design and simulation of ZnO based Film Bulk Acoustic Resonator as a mass sensor”, India International Science Festival (IISF) – Young Scientists’ Conclave (YSC), Dec 8-11, 2016.
  • Manish Kumar Gupta, R K Khanna, K J Rangra, “Study and Analysis of Human Nervous System and Effects of External EM Signals on Conduction in Human Nerves” International Journal on Recent and Innovation Trends in Computing and Communication ISSN: 2321-8169, Volume: 4 Issue: 4, 448 – 458, April 2016
  • Manish Kr. Gupta, R K Khanna, K J Rangra, Y K VIjay “interaction of cell phone radiations on electrochemical transmission in nervous system”, International Conference on Intelligent Computing and Applications 2016 (ICICA 2016), 20-22 Dec. 2016
  • Deepak Bansal, Anuroop Bajpai, Prem Kumar, Maninder Kaur, Amit Kumar, Achu Chandran and Kamaljit Rangra, “Low voltage driven RF MEMS capacitive switch with reduced buckling”, Journal of Micromechanics and Microengineering (IOP), 27(2), 024001 (2016).
  • Surender Gaur, Sandhya, Prem Kumar, Dinesh Kumar and K.J. Rangra, “Infrared heat transfer analysis in AlN based multilayer pyroelectric IR detector”, INROADS (International Conference IAET-2016 Special Issue), Vol. 5, No. 1, Jan-June, 2016, pp-89-92, doi: 10.5958/2277-4912.2016.00018.7.
  • Surender P. Gaur, Kamaljit Rangra, Dinesh Kumar, “Brief analytical study on pyroelectric IR detector: Review”, International Conference on Sustainable Development through Research In Engineering and Management -2016, YMCAUST-Faridabad 121006, December 26-27 2016.
  • Deepak Bansal, Anuroop, Prem Kumar, Maninder Kaur and Kamaljit Rangra “Fabrication and Analysis of RF MEMS Series Capacitive SPDT Switch” Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) 15 (4), 045001 (2016).
  • Deepak Bansal, Anuroop Bajpai, Prem Kumar, Maninder Kaur, and Kamaljit Rangra, “Low Actuating Voltage Spring-Free RF MEMS SPDT Switch”, Journal of Electrical and Computer Engineering, 2016, 7984548 (2016).
  • Neha Shukla, Maninder K, Deepak Bansal, K J Rangra, “Design of Single Pole Bulk Micromachined High Depth Cavity Filter”, Invertis Journal of Science & Technology, 9 (1), 49-53 (2016).
  • Deepak Bansal, Anuroop, Prem Kumar , Maninder Kaur, Surender Gaur, Prateek Kothari, Arvind K Singh and Kamaljit Rangra, “Change of Characteristic Length with Packaging for Torsional MEMS Switch”, AIP Conf. Proc. 1724, 020030 (2016).
  • K. Maninder, Deepak Bansal and K. J. Rangra,” Design of MEMS based ‘cross over junction’ for T-type switch”, AIP Conf. Proc. 1724, 020055 (2016).
  • Shilpi Pandey, Deepak Bansal, Deepak Panwar, Neha Shukla, Arvind Kumar, Prateek Kothari, Seema Verma and K. J. Rangra, “Low cost lift-off process optimization for MEMS applications” , AIP Conf. Proc. 1724, 020105 (2016).
  • Shilpi Pandey, Prateek Kothari, Sunil Kumar Sharma, Seema Verma, K. J. Rangra “Impact of post deposition annealing in O2 ambient on structural properties of nanocrystalline hafnium oxide thin film” Mater Sci: Mater Electron, DOI 10.1007/s10854-016-4663-6 , Accepted: 8 March 2016 Springer, New York 2016.
  • Mahanth Prasad, Vineet Sahula, Vinod Kumar Khanna, “Influence of Temperature on the Sensitivity of ZnO-Based MEMS Acoustic Sensor”, Sensor Letter, vol. 14, issue 2, pp 122-126, Feb. 2016.
  • Gurpreet Singh Gill and Mahanth Prasad, “development of Film Bulk Acoustic Wave Resonator: A Review”, Sensor Letters, Volume 14, Number 4, April 2016, pp. 346-361, 2016.
  • Magandeep Kaur, Mahanth Prasad, “Development of double spiral MEMS hotplate using front-side etching cavity for gas sensors , AIP Conference Proceedings, Vol. 1724, issue 01, pp. 20053, April 2016.
  • Gurpreet Singh Gill, Tarandip Singh, Mahanth Prasad, “Study of FBAR response with variation in active area of membrane”, AIP Conference Proceedings, Vol. 1724, issue 01, pp. 20040, April 2016.

2015

  • M. Angira and K. Rangra, “A novel design for low insertion loss, multi-band RF-MEMS switch with low pull-in voltage,” JESTECH, Elsevier, DOI:10.1016/j.jestch. 2015.07.001 Aug – 2015. (Engineering Science And Technology, An International Journal Elsevier, The Netherlands
  • Anuroop, Deepak Bansal, Prem Kumar, Maninder Kaur, Kamaljit Rangra, “Low temperature bonding techniques for MEMS devices” 10th IEEE-Regional Symposium on Micro and Nano Electronics, Kuala Terengganu, Malaysia, Aug 2015.
  • Deepak Bansal, Anuroop Bajpai, Prem Kumar, Amit Kumar, Maninder Kaur, and Kamaljit Rangra, “Design and fabrication of a reduced stiction radio frequency MEMS switch”, J. Micro/Nanolith. MEMS MOEMS. 14(3), 035002 (2015).
  • Deepak Bansal, Amit Kumar, Akshdeep Sharma and K J Rangra “Design of Compact and Wide Bandwidth SPDT with Anti-stiction Torsional RF MEMS Series Capacitive Switch” Microsystem Technologies Journal, 21(5), 1047-1052 (2015).
  • Shilpi Pandey, Deepak Bansal, Prachi Jhanwar, Seema Verma, and K.J. Rangra, “Design of Reliable Analog DMTL Phase Shifter with Improved Performance for Ku Band Applications”, Defence Science Journal, 65(5), 403-410 (Sept. 2015).
  • Shilpi Pandey, Deepak Bansal, Prachi Jhanwar, Seema Verma, and K. J. Rangra, “Design of DMTL Phase Shifter with Large Tuning Range using Symmetric Toggle Switch for X and Ku band Applications”, Billingual International Conf. on Information Technology: yesterday, today, and tomorrow, Defense Scientific Information and Centre (DESIDOC), DRDO, India, Feb 2015.
  • Prachi Jhanwar, Deepak Bansal, Shilpi Pandey, Seema Verma, K. J. Rangra, “Design aspect of high power handling applications: metal contact switches” Microsystem Technologies, Vol. 21 (10), 2083-2087 (October 2015).
  • M. Angira and K. Rangra, “Performance improvement of RF-MEMS capacitive switch via asymmetric structure design,” Microsystem Technologies, Springer, vol. 21, pp. 1447–1452, July 2015.
  • Deepak Bansal, Amit Kumar, Akshdeep Sharma and K J Rangra “Design of Compact and Wide Bandwidth SPDT with Anti-stiction Torsional RF MEMS Series Capacitive Switch” Microsystem Technologies Journal, 21(5), 1047-1052 (2015), DOI: 10.1007/s00542-014-2238-0. MAY 2015
  • Tejinder Singh, Wael M. El-Medany and Kamal J. Rangra “Modeling Method of Finite Element Modeler and Electromagnetic Solvers for Education and Research in RF MEMS”, ELECTRONICS, VOL. 19, NO. 1, JUNE 2015 (http://www.mdpi.com/journal/electronics, peer-reviewed, open-access journal)
  • Tejinder Singh, Kamal J. Rangra, “Compact low-loss high-performance single-pole six-throw RF MEMS switch design and modeling for DC to 6 GHz” Microsystem Technologies, January 2015, DOI: 10.1007/s00542-015-2411-0
  • M. Angira and K. Rangra, “Design and investigation of a low insertion loss, broadband, enhanced self and hold down power RF-MEMS switch,” Microsystem Technologies, Springer, vol. 21, pp. 1173-1178, 2015. JUNE 2015
  • Mahanth Prasad, Dhairya Singh Arya and Vinod Kumar Khanna, “Fabrication and reliability study of a double spiral platinum-based MEMS hotplate”, J. Micro/Nanolith. MEMS MOEMS, 14(2), pp. 0250031-0250031-9, (Apr–Jun 2015).
  • Mahanth Prasad “Design, development and reliability testing of a low power bridge-type micromachined hotplate”, Journal of Microelectronics Reliability, DOI: 10.1016/j.microrel.2015.03.005, 02 March 2015.
  • D.S. Arya , Mahanth Prasad and C.C. Tripathi “Design and Modeling of a ZnO-Based MEMS Acoustic Sensor for Aeroacoustic and Audio Applications” 2nd international symposium on physics and technology of sensors, (ISPTS-2), 06-Pages, 8-10 March 2015, CMET-Pune, Maharashtra, India.
  • Mahanth Prasad, R.P. Yadav, V. Sahula and V.K. Khanna, “Design and mathematical model of a ZnO-based MEMS acoustic sensor”, Proc. SPIE, 16th International Workshop on Physics of Semiconductor Devices,Proc. of SPIE, vol 01/2012; 8549:85491D-1.
  • Mahanth Prasad, Neha Arora and V.K. Khanna “Design, simulation and fabrication of Pt-based micro-heater for gas sensing applications”,International Conference on Emerging Technologies: Micro to Nano (ETMN), P. No. 191631344, 23-24 Feb. 2013, BITS-Pilani, K K-Birla Campus Goa, India.
  • Magandeep Kaur and Mahanth Prasad, “Development of Double Spiral MEMS hotplate Using Front-Side Etching Cavity for Gas Sensors” 2nd International Conference on Emerging Technologies: Micro and Nano, Oct. 24-25, 2015, Jaipur, India, pp. 13-14.

2014

  • M. Angira and K. Rangra, “A low insertion loss, multi-band, fixed central capacitor based RF-MEMS switch,” Microsystem Technologies, Springer, pp.1-6,2014. November 2014, DOI:10.1007/ s00542 -014-2378.2
  • Deepak Bansal, Amit Kumar, Akshdeep Sharma, Prem Kumar, K. J. Rangra, “Design of novel compact anti-stiction and low insertion loss RF MEMS switch”, Microsystem Technologies, 20 (2), 337–340 (2014), DOI-10.1007/s00542-013-1812-1.
  • Amit Kumar, Prem Kumar, Deepak Bansal and Kamaljit Rangra, “Low cost process for development of electrostatically actuated optical devices using gold electroplating”, IEEE India Conference (INDICON), Pune, India. Dec 11-13, 2014
  • Deepak Bansal, Amit Kumar, Prem Kumar, Maninder Kaur, and Kamaljit Rangra, “Comparison of Packaging Technologies for RF MEMS Switch”,Progress In Electromagnetics Research M, 38, 123–131, 2014.
  • Prachi Jhanwar, Deepak Bansal, Shilpi Pandey, Seema Verma, K. J. Rangra, “Design aspect of high power handling applications: metal contact switches” Microsystem Technologies Journal (2014) DOI: 10.1007/s00542-014-2300-y.
  • Akshdeep Sharma, Prachi Jhanwar, Deepak Bansal, Amit Kumar, Maninder Kaur, Shilpi Pandey, Prem Kumar, Dinesh Kumar, and Kamaljit Rangra “Comparative Study of Various Release Methods for Gold Surface Micromachining” Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3), 13(1), 013005 (Jan–Mar 2014).
  • Deepak Bansal, Akshdeep Sharma, Amit Kumar, Priyanka Dwivedi, Maninder Kaur and K J Rangra, “Design of bottom contact vertical packaging technology for rf mems switch” ISSS International Conference on Smart Materials, Structures and Systems July 08-11, 2014, Bangalore, India
  • M. Angira, G. M. Sundaram, and K. Rangra, “A novel interdigitated, inductively tuned, capacitive shunt RF—MEMS switch for X and K bands applications,” in International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS), Hawaii,USA, April 13-16, 2014, pp. 139-142.
  • Prachi Budania and K J Rangra, “Deflection and temperature analysis of a u-beam thermal actuator for mems applications”, ISSS International Conference on Smart Materials, Structures and Systems, (IISc/CMTI/MSRIT Bangalore) National Science Seminar Complex, IISc Bangalore India, July 8-11, 2014
  • M. Angira, G. M. Sundaram, and K. Rangra, “Improved Design of RF-MEMS Series-Shunt Switch for Reconfigurable RF Front End Applications,” in International Conference on MEMS and Sensors, IIT Madras, Chennai, Dec. 2014,
  • G. M. Sundaram, M. Angira, and K. Rangra, “An Approach For Motional Resistance Minimization in RF MEMS Disk Resonator,” in National conference on Recent Trends in Communication and Signal Processing, Coimbatore, India, Feb 2014
  • Akshdeep Sharma, Deepak Bansal, Amit Kumar, Dinesh Kumar, Kamaljit Rangra “Residual stress control during the growth and release process in gold suspended microstructures” SPIE Photonic West 2014 held at San Francisco USA , during 1-6 Feb. 2014.
  • Priyanka Dwivedi, Akshdeep Sharma, Deepak Bansal and KJ Rangra, “Novel capacitive method for the determination of deflection of cantilever beams” ISSS International Conference on Smart Materials, Structures and Systems July 08-11, 2014, Bangalore, India
  • Amit Kumar, Prem Kumar, Deepak Bansal, Akshdeep Sharma and K J Rangra, “Design and analysis of a novel digital micromirror device with hidden hinges based on double bridge technology” ISSS International Conference on Smart Materials, Structures and Systems July 08-11, 2014, Bangalore, India.
  • K. Maninder, Deepak Bansal, Shilpy Pandey, Priyanka Dwivedi, Akshdeep Sharma, K. J. Rangra “Study of HfO2 as a dielectric material for rf mems switches” ISSS International Conference on Smart Materials, Structures and Systems July 08-11, 2014, Bangalore, India
  • M Angira and K J Rangra, “Performance improvement of RF-MEMS capacitive switch via asymmetric structure design”, Microsystem Technologies Journal (2014) DOI: 10.1007/s00542-014-2222-8.
  • KJ Rangra, “ Induced Stress Characterization and measurement Test Structures for Micro-Mechanical Systems”, 3rd National conference on Advances in Metrology Feb 2014.
  • Ravinder Agarwal, Deepti Mittal, Rakesh Sharma, Kamaljit Rangra and SK Sharma, “Ultrasonic and Scanning Electron Microscope Study of Wood in Longitudinal and Transverse Direction”, 3rd National conference on Advances in Metrology Feb 2014.
  • M Angira and K J Rangra, “Design and investigation of a low insertion loss, broadband, enhanced self and hold down power RF-MEMS switch”, Microsystem Technologies Journal (2014) DOI: 10.1007/s00542-014-2188-6.
  • Ashwani S. Tripathi, Vipula V. Mishra,and Mahanth Prasad, “Design and Simulation of AlN-based MEMS Acoustic Sensor for High SPL”, Journal Inroads (Special Issue), vol. 3, no.1, pp. 27-30, Jan-June 2014.
  • Mahanth Prasad and Vinod Kumar Khanna, “A low-power, micromachined, double spiral hotplate for MEMS gas sensors”, Journal of MicrosystTechnol, DOI: 10.1007/s00542-014-2393-3, 16 Dec. 2014.
  • Washim Reza Ali, Mahanth Prasad, “Design and fabrication of microtunnel and Si-diaphragm for ZnO based MEMS acoustic sensor for high SPL and low frequency application”, Journal of MicrosystTechnol, DOI: 10.1007/s00542-014-2291-8, Aug. 2014.
  • Mahanth Prasad and V. K. Khanna, “Design and Development of an array of Dielectric Suspended Membranes for Microhotplate Applications”, Sensors and Transducers Journal, vol. 170, Issue 5, pp. 41-47, May 2014.
  • Jyoti Yadav, Vipula V. Mishra,and Mahanth Prasad, “Design and partial fabrication of low power Pt-based microheater for gas sensing application”, Journal Inroads (Special Issue), vol. 3, no. 1, pp. 261-265, Jan-June 2014.
  • Mahanth Prasad, Vineet Sahula and Vinod Kumar Khanna, “ZnO Etching and Microtunnel Fabrication for High Reliability MEMS Acoustic Sensor”, IEEE Transactions on Device and Material Relability, vol. 14, no. 1, pp. 545-554, March 2014.
  • Mahanth Prasad, Vineet Sahula and Vinod Kumar Khanna, “Long-Term Effects of Relative Humidity on the Performance of ZnO-Based MEMS Acoustic Sensors”, IEEE Transactions on Device and Material Relability, vol. 14, no. 2, pp. 778-780, June 2014.
  • Mahanth Prasad, V. Sahula and V. K. Khanna “Simulation and fabrication of MEMS acoustic sensor for low frequency applications” International Conference on Optics & Optoelectronics (ICOL), 04-pages, 05-08March 2014, IRDE Dehradun, Uttarakhand, India.
  • D.S. Arya, Mahanth Prasad and C.C. Tripathi “Piezoelectric MEMS Microphone: A Review”, 2nd National Conference on Converging Technologies Beyond 2020 (2CTB-2020), 06-pages, 28-29 November 2014, UIET-KUK, Kurukshetra, Haryana, India.

2013

  • Prachi Jhanwar, Akshdeep Sharma, Shilpi Pandey, Ravi Bhatia, K.J. Rangra, Seema Verma “Thick Photoresist optimization for MEMS Structures” International Conference on Emerging Technologies: Micro to Nano 2013 (ETMN-2013) to be held at BITS Pilani, KK Birla Goa campus, Goa, India during 23-24 February 2013.
  • Akshdeep Sharma, Maninder Kaur, Prachi Jhanwar, Deepak Bansal, Shilpi Pandey, Prem Kumar, Dinesh Kumar, Surinder Singh and K. J. Rangra “Comparative Study of Various Release Methods for Gold Surface Micromachining” Techconnect World 2013 held at Washington DC USA during 12-16 May 2013.
  • Akshdeep Sharma, Deepak Bansal, Dinesh Kumar, and K. J. Rangra “Experimental study on sheet resistivity and thickness measurement in Copper Electroplating” NSTI-Nanotech 2013, www.nsti.org, ISBN 978-1-4822-0584-8 Vol. 2, 2013, pp166-168.
  • M. Angira, G. M. Sundaram, K. Rangra, D. Bansal, and M. Kaur, “On the investigation of an interdigitated, high capacitance ratio shunt RF-MEMS switch for X-band applications,” in NSTI -Nanotech, Washington D.C, USA, May 12-15, 2013, pp. 189-192.
  • M. Angira, G. M. Sundaram, and K. Rangra, “Design, Simulation and Analysis of a high Reliability Series Ohmic RF-MEMS Switch for Telecommunication Applications,” in International Conference on Control, Computing, Communication and Materials, Allahabad, India, Aug 3-4, 2013
  • G. M. Sundaram, M. Angira, and K. Rangra, “VHF MEMS Disk Resonator Design and Simulation,” in International Conference on RF and Signal Processing Systems, Vijaywada, India, July 2013, pp. 159-163.
  • G. M. Sundaram, M. Angira, and K. Rangra, “Voltage Controlled MEMS Tunable Resonator Design and Analysis,” in International Conference on Smart Structures & Systems, Chennai, India, March 28-29, 2013, pp. 1-3.
  • Sandeep Mukundan, Ram Prasad, Deepak Bansal, KJ Rangra, “Modelling of spring constant and switching time of cantilever RF MEMS Switch” , International Conference on Emerging Technologies: Micro to Nano 2013 (ETMN-2013), BITS Pilani, KK Birla Goa campus, Goa, India during 23-24 February 2013
  • Utraksh Kanwar Singh, Prachi Jhanwar, Deepak Bansal, KJ Rangra, “A novel Cantilever Beam design for inline ohmic RF MEMS switches with reduced pull in and residual stresses”, International Conference on Emerging Technologies: Micro to Nano 2013 (ETMN-2013), BITS Pilani, KK Birla Goa campus, Goa, India during 23-24 February 2013
  • Mahanth Prasad, Vineet Sahula and Vinod Kumar Khanna, “Design and fabrication of Si-diaphragm, ZnO piezoelectric film-based MEMS acoustic sensor using SOI wafers”, IEEE Transactions on Semiconductor Manufacturing, vol. 26, no. 2, pp. 233-241, May 2013.
  • Mahanth Prasad, Washim Reza Ali, V. Sahula, V.K. Khanna and R. P. Yadav, “Design and fabrication of Si-diaphragm for ZnO-based MEMS acoustic sensor”, 17th International Symposium on VLSI, Design and Test (VDAT)-2013, 04-pages, 27-30 July 2013, MNIT Jaipur.
  • Mahanth Prasad, Neha Arora and V.K. Khanna “Design, simulation and fabrication of Pt-based micro-heater for gas sensing applications”,International Conference on Emerging Technologies: Micro to Nano (ETMN), P. No. 191631344, 23-24 Feb. 2013, BITS-Pilani, K K-Birla Campus Goa, India.
  • Mahanth Prasad, Gurpreet Singh Gill, Subha Laxmi and V.K. Khanna “Design and Fabrication of Microhotplate for Gas Sensing Application” ISSS National Conference on MEMS, Microsensors, Smart Materials, Structures and Systems, 04-pages, 06-07 Sept. 2013, Pune India.
  • Mahanth Prasad, V. Sahula, and V. K. Khanna“Zinc Oxide deposition and etching for MEMS acoustic sensor”IETE Diamond Jubilee National Seminar on Sensors-Technology & Applications, STA P14, Aug. 29-30, 2013, KITM, Kurukshetra, India.
  • D.S. Arya, Mahanth Prasad and C.C. Tripathi “Piezoelectric MEMS Microphone: A Review”, 2nd National Conference on Converging Technologies Beyond 2020 (2CTB-2020), 06-pages, 28-29 November 2014, UIET-KUK, Kurukshetra, Haryana, India.

2012

  • Deepak Bansal, Akshdeep Sharma, ManinderKaur, Priyanka Dwivedi and Kamaljit Rangra “Packaging of MEMS structures using localized heating” Fifth ISSS National Conference on MEMS, Smart Materials, Structures and Systems, Institute of Smart Structures and Systems (ISSS) Karpagam University, Coimbatore, September 21-22, 2012
  • Deepak Bansal, Akshdeep Sharma, K. Maninder, K. J. Rangra “Design of vertical packaging technology for RF MEMS Switch”, Proc. SPIE 8549, 16th International Workshop on Physics of Semiconductor Devices, 854911 (October 15, 2012); doi:10.1117/12.924260
  • M. Angira, G. M. Sundram, and K. Rangra, “Design and pull-in voltage optimization of series metal-to-metal contact RF MEMS switch,” in International Conference on Computing, Communication and Applications (ICCCA), Dindigul, India, Feb 2012,
  • G. M. Sundaram, M. Angira, and K. Rangra, “Design and simulation of two port RF MEMS resonators,” in International Conference on Computer Communication and Informatics, Coimbatore, India, Jan – 2012
  • Akshdeep Sharma, Deepak Bansal, KamaljitRangra , Dinesh Kumar“ A Test Structure for in-situ Determination of Residual Stress”, UACEE International Journal of Advances in Electronics Engineering Volume 2: Issue 3 ISSN 2278 – 215X (Online) December 2012, pp.139-142.
  • G. M. Sundaram, M. Angira, and K. Rangra, “Design of VHF MEMS Disk Resonator,” International Journal of Systems and Technologies, vol. 5, pp. 18- 25, 2012. (July 2012)
  • Akshdeep Sharma, Deepak Bansal, ManinderKaur, Prem Kumar, Dinesh Kumar,Rina Sharma and K. J. Rangra, “Fabrication and Analysis of MEMS Test Structures for Residual Stress Measurement”, Sensors & Transducers Journal, Vol. 13, Special Issue, December 2011, pp. 21-30.
  • K. J. Rangra, K. Maninder, Deepak Bansal, Akshdeep Sharma “Compact high reliability RF MEMS switches with low cost wafer level packaging”, ISSS-2012, 4-7 Jan. 2012, Bangalore-India.
  • Soumendu Sinha, Deepak Bansal and KJ Rangra “RF MEMS T-Type Switch for Redundancy Switch Matrix Applications in Space Telecommunication”, ISSS-2012, 4-7 Jan. 2012, Bangalore-India.
  • Sumit Kumar Khandelwal, Deepak Bansal, K J Rangra “Silicon micromachined K-band filters”, 2012 International Conference on Computing, Electronics and Electrical Technologies [ICCEET], DOI: 10.1109/ICCEET.2012.6203817
  • Soumendu Sinha, Deepak Bansal and KJ. Rangra “Design and Optimization of RF MEMS T-Type Switch for Redundancy Switch Matrix Applications”, 2012 International Conference on Computing, Electronics and Electrical Technologies [ICCEET], 2012, Page(s): 501- 508, DOI: 10.1109/ICCEET.2012.6203826.
  • Sandeep Mukundan, Deepak Bansal, “A Novel Design to enhance the switching speed of RF MEMS switches”, National conference on Smart Materials Structures and Systems, Sep. 21-22, 2012, Coimbatore, India
  • Mahanth Prasad, R. P. Yadav, V. Sahula and V. K. Khanna “FEM simulation of platinum-based microhotplate using different dielectric membranes for gas sensing applications”, Journal Sensor Review, vol. 32, issue 1, pp. 59-65, 2012.
  • Mahanth Prasad, R. P. Yadav, V. Sahula, V. K. Khanna and Chandra Shekhar, “Controlled Chemical Etching of ZnO Film for Step Coverage in MEMS Acoustic Sensor”, IEEE Journal of Microelectromechanical Systems Letters, vol. 21, no. 3, pp. 517–519, June 2012.
  • Mahanth Prasad, R.P. Yadav, V. Sahula and V.K. Khanna, “Design and mathematical model of a ZnO-based MEMS acoustic sensor”, Proc. SPIE, 16th International Workshop on Physics of Semiconductor Devices,Proc. of SPIE, vol 01/2012; 8549:85491D-1.
  • Mahanth Prasad, R. P. Yadav, V. Sahula and V.K. Khanna “Design and simulation of Pt-based microhotplate, and fabrication of suspended dielectric membrane by bulk micromachining”, Proc. SPIE, 16th International Workshop on Physics of Semiconductor Devices, 2012.
  • Reema Gupta, Vinay Gupta, Kajal Jindal, Anjali Sharma, Monika Tomar, Mahanth Prasad,Arti Arora, “Growth of thick ZnO films for acoustic sensors and SAW devices” 23rdAGM, Material Research Society of India, held at Patiala in Feb. 2012.

2011

  • Akshdeep Sharma, Maninder Kaur, Deepak Bansal, Dinesh Kumar, Kamaljit Rangra, “Review of MEMS test structures for mechanical parameter extraction” , J. Nano-Electron. Phys, 3(1), 243-253 (2011)
  • Rekha Yadav, Rajesh Yadav, Vijay Nehra, K. J. Rangra, “RF MEMS Switches: Fabrication : Key Features, Application & Design Tools” International Journal of Electronics Engineering, 3 (2), 2011, pp. 179– 183
  • K. Maninder, Akshdeep Sharma, Deepak Bansal, Dinesh Kumar, Surinder Singh, K. J. Rangra, “Design Optimization Of Deflection Caused After Release Of Multilayer Structural Membrane Of Symmetric Toggle Switch”, Journal of Nano and Electronic Physics, 3(1),787 – 791 (2011).
  • Akshdeep Sharma, Deepak Bansal, Maninder Kaur, Prem Kumar, Dinesh Kumar, Rina Sharma and K J Rangra, “Fabrication and Analysis of MEMS Test structures for Residual Stress Measurement”, Sensors & Transducers,13, 21-30 (2011).
  • K. Maninder, Akshdeep Sharma, Deepak Bansal, Dinesh Kumar, Surinder Singh, K. J. Rangra, “Comparison of Electrical performance of Symmetric Toggle Switch with different dielectric layers”, Tech Connect World 2011, Boston, MA, U.S.
  • Mahanth Prasad, V. Sahula, Senior Member, IEEE, and V. K. Khanna, “A Novel Design and Mathematical Model for Sensitivity of a MEMS based Piezoelectric Acoustic Sensor,” International Journal of Applied Engineering Research (IJAER), vol. 6, no. 18, pp. 2211-2216, 2011.
  • Mahanth Prasad, R. P. Yadav, V. Sahula and V. K. Khanna “Design and Simulation of Double-spiral Shape Micro-heater for Gas Sensing Applications”, Sensors and Transducers Journal, vol. 129, issue 6, pp. 135-141, June 2011.
  • Mahanth Prasad, R. P. Yadav, V. Sahula and V.K. Khanna “Design and simulation of Pt-based microhotplate, and fabrication of suspended dielectric membrane by bulk micromachining”, International Workshop on Physics of Semiconductor Devices (IWPSD), ME-14, 19 to 22th Dec. 2011.
  • Mahanth Prasad, R. P. Yadav, V. Sahula and V.K. Khanna “Design and Mathematical Model of a ZnO-based MEMS Acoustic sensor”, International Workshop on Physics of Semiconductor Devices (IWPSD), ME-P.23, 19 to 22th Dec. 2011.

2010

  • Akshdeep Sharma, Maninder Kaur, Deepak Bansal, Dinesh Kumar, K. J. Rangra, “Fabrication of MEMS Test Structures to Monitor Residual Stress”, Tech Connect World 2011, Boston, MA, U.S.A.
  • K. Maninder, Akshdeep Sharma, K. J. Rangra, Dinesh Kumar, Surinder Singh, “Low Loss STS based SPDT for X Band Application”, Procedia Engineering, Elsevier, Science Direct, vol. 5, 2010, pp. 738-741.
  • K. Maninder, Akshdeep Sharma, K. J. Rangra, Dinesh Kumar, Surinder Singh, “Design of compact, high capacitance ratio MEMS switches for X – Band applications using high-k dielectric materials”, Proc. Of Tech Connect 2010, NSTI-Nanotech 2010, Anaheim, California, U.S.A., vol.2, pp. 332-335.
  • Mahanth Prasad, Deep Lal Sharma, R. P. Yadav and V.K. Khanna “ FEM Simulation of Micro-Hotplate for Gas Sensing Applications”, International Conference on Nanosensors and Technology (ICNST-2010), 28 to 30 Oct. 2010, CSIO, Chandigarh, India.
  • Mahanth Prasad, Deep Lal Sharma, R. P. Yadav and V.K. Khanna “Stress Distribution of Suspended Membrane for Micro-hotplate Applications”, International Conference on Nanosensors and Technology (ICNST-2010), 28 to 30 Oct. 2010, CSIO, Chandigarh, India.

2009

  • K. Maninder, K. J. Rangra, Dinesh Kumar, Surinder Singh, “Parametric Optimization of Symmetric Toggle RF MEMS Switch for X-Band Applications”, International Journal of Recent Trends in Engineering, vol-2, no. 7, November 2009, pp. 95-98.
  • K. Maninder, K. J. Rangra, Dinesh Kumar, Surinder Singh , “Low Insertion Loss RF MEMS Symmetric Toggle Switch for Wireless Applications ”, Proc. of IWPSD 2009, XV International workshop on physics of semiconductor devices, New Delhi, India, December 15 – 19, 2009, pp. 1274 – 1277
  • Sukomal Dey, K. J. Rangra, K. Maninder, “Multi-Bit RF MEMS Phase Shifter for Ku-Band Application ”, Proc. of IWPSD 2009, XV International workshop on physics of semiconductor devices, New Delhi, India, December 15 – 19, 2009, pp. 1286 – 1289
  • Sukomal Dey, Kamaljit Rangra “Compact Ku-band 3-bit distributed MEMS phase shifter” International Symposium of Microwave and Optical Technology, ISMOT, New Delhi, December 16 -19, 2009
  • S Dey, S Srivastava, K J Rangra “ Design optimization of low loss distributed RFMEMS Phase shifter”, International Conference on Mechanical and Electronics Engineers (ICMEE_2009), Chenni India, June 27-29, 2009.
  • Ayush Garg, Kamal J Rangra, Sapan Jain, K. Maninder and Surinder Singh, “Compact Low Insertion Loss RF MEMS Symmetric Toggle Switch”, Proc. of ICMEMS-09, January 3-5, IIT Madras Chennai, India.
  • SavitaMaurya and Kamal J Rangra, “Microstrip implementation of RFMEMS series switch: Design, Modeling and Simulations”, International Conference on MEMS, ICMEMS 2009, IIT Madras, Chennai, India.
  • Sapan Jain, Kamal J Rangra, AyushGarg, “Asymmetric Micro-Torsion Actuator Based MEMS Logic Gates”, International Conference on MEMS, ICMEMS 2009, IIT Madras, Chennai, India.
  • Mahanth Prasad, V.K. Khanna and Ram Gopal “Design and Development of Polysilicon-based Microhotplate for Gas sensing Application”, Sensors and Transducers Journal, vol.103, issue 4, pp.44-51, April 2009.
  • Mahanth Prasad, Mrityunjoy Kr. Ray, B. D. Pant and V.K. Dwivedi, “Testing and Measurement of Piezoresistive Pressure Sensor”, Application Specific Trends of Electronics Devices Circuits and Systems (ASTECS), Proc. ASTECS09, vol. 1, pp. 114-115, Feb. 2009.

2008

  • Akshdeep Sharma, Dinesh Kumar, B. D. Pant and K. J. Rangra, “Low Stress Metal deposition by electroforming for MEMS LIGA Processes”, IMAPS, Dec. 15-18, 2008, Bangalore, India.
  • Savita Maurya, “Microstrip high performance switch: design and simulations” Proceedings of ISSS 2008 (Student Paper), International Conference on Smart Materials Structures and Systems, July 24-26, 2008, Bangalore, India.
  • K. Maninder, K.J. Rangra, Dinesh Kumar, S. Kumar, N. Girdhar, P. Boora, S. Maurya and Surinder Singh, “Effect of multilayer structure on electromechanical characteristics of RF MEMS capacitive Symmetric Toggle Switch for X-band applications”, Proc. of ISSS-08, International Conference on Smart Structures and Systems, Bangalore, India, July 24-26, 2008.
  • P. Boora, Savita Maurya, N Girdhar, K. Maninder, K. J. Rangra, “Design optimization of RF MEMS meander based ohmic contact switch in CPW and micro-strip line implementation”, Proc. of ISSS-08, International Conference on Smart Structures and Systems, Bangalore, India, July 24-26, 2008.
  • K. J. Rangra, Maninder Kaur and Dinesh Kumar, “Design optimization of RF MEMS capacitive Symmetric Toggle Switch for X-band wireless applications”, Proc. of ISSS-07, National conference on Smart Structures and Systems, Pilani, Rajasthan, India, November 16-17, 2007.
  • K J Rangra and P Debnath,” One bit distributed X-band phase shifter based on meander suspended RFMEMS switches, Proceedings of the IMS Conference -2007, August 17-18, 2007, PEC, Chandigarh, India.
  • K J Rangra ,“ Electrostatic Radio Frequency MEMS”, NSRTP-2005, National Seminar on Recent Trends in Physics, October 28-29, 2005 Birla Institute of Technology and Science, Pilani, India.
  • K J Rangra , B. Margesin, F. Giacomozzi and G. Soncini, “Symmetric Toggle Switch – an Electrostatic Low Actuation Voltage RFMEMS Switch for Wireless Communication: Varactor Configuration”, IWPSD – 2005Thirteenth International Workshop on the Physics of Semiconductor Devices, National Physical Laboratory, New Delhi, INDIA , December 13-17, 2005, pp. 625 -628. “Best Poster Paper Award”.
  • K J Rangra et al, “On reinforced, high capacitance, low actuation voltage RFMEMS capacitive switches” NCS-2005, National Conference on Sensors, Nov. 25-26, 2005, Thapar Institute of Engineering and technology, Patiala.
  • K. J. Rangra, F. Giacomozzi, B. Margesin, L. Lorenzelli, C. Collini and G. Soncini. “Symmetric Toggle Switch – A New type of RFMEMS Switch for Telecommunication Applications: Design and Fabrication”,Sensors and Actuators A 123–124 (2005),pp.505–514.
  • K. J. Rangra, F. Giacomozzi, B. Margesin, L. Lorenzelli, C. Collini and G. Soncini. “On Reinforced High Capacitance, low actuation voltage RFMEMS capacitive switches”, Romanian Journal of Information Science and Technology, Romania ,Vol. 5, 2005,pp. 315-320.
  • J. Iannacci, L. Del Tin, R.Gaddi, A.Gnudi, B. and K. J. Rangra,.“Compact Modeling of a MEMS Toggle-Switch based on Modified Nodal Analysis”, DTIP 2005, Montreux, Switzerland.
  • K. J. Rangra, B. Margesin, L. Lorenzelli, F. Giacomozzi, C. Collini, and G. Soncini, “Symmetric Toggle Switch” – A New type of RFMEMS Switch for Telecommunication Applications” EUROSENSORS XVIII, 2004, Rome, Italy, Sept. 13-15, 2004, pp. 255-256.
  • K. J. Rangra, B. Margesin, F. Giacomozzi, L. Lorenzelli, C. Collini and G. Soncini, “Electromechanical Characterization and Capacitive Behavior of Low Spring Constant – RFMEMS Switches”, Actuator-2004, 9th International Conference on New Actuators and the 3rd International and Exhibition on Smart Actuators and Drive Systems, Bremen, Germany, 14-16 June 2004, pp. 513-516.
  • K. J. Rangra, F. Giacomozzi, B. Margesin, L. Lorenzelli, V. Mulloni, C. Collini, R. Marcelli, and G. Soncini, “Micromachined Low Actuation Voltage RFMEMS Capacitive Switches – Technology and Characterization” , CAS 2004, International Conference, Sinaia, Romania, October 4-6, 2004, pp. 165-168.
  • K. J. Rangra, L. Lorenzelli L, C. Collini, B. Margesin, F. Giacomozzi, and G. Soncini, “Electromechanical Characterization of Low Spring Constant – RFMEMS Switches”, AISEM-2004, 9th National Conference on Sensors and Microsystems, Ferrara, Italy, Feb. 8-11, 2004, pp. 443-448.
  • L. Lorenzelli, K. J. Rangra, C. Collini, F. Giacomozzi, B. Margesin and F. Pianegiani, “On-wafer electro-mechanical characterization of silicon MEMS switches” DTIP 2003, MEMS&MOEMS, Cannes Mandelieu, France, May 2003. pp 281-285.
  • L. Lorenzelli, K. J. Rangra, C. Collini and B. Margesin, “Quasi-static C-V measurements on RFMEMS test structures”, AISEM-2003,8th National Conference on Sensors and Microsystems, Trento, Italy, Feb. 2003.
  • C. Armaroli, L. Ferrario, F. Giacomozzi, L. Lorenzelli, B. Margesin, K. J. Rangra, G. Tommaso, “A Silicon Based MEMS Technology for Electro-statically Actuated SPDTRFSwitches”,European Space Component Conference [ESCCON 2002], Toulouse, France, September 24-27, 2002.
  • Pant BD, Deshmukh PR, Rangra K J, Kumar S and Wadhawan OP, “ Micro-machining of single crystal silicon in Fluorine based reactive plasma for the fabrication of high density nano-tip filed –emitter arrays”. IWPSD -2001, Dec 11-15, New Delhi.
  • K. J. Rangra, P. R. Deshmukh, S. Kumar, O. P. Wadhawan and S. Ahmad, “Fabrication of high Density silicon micro-tip arrays for field emission applications”, Proce. Of National Conf. on Materials and Semiconductor Tech. in Electronics Research. GBP Uni. Of Agri. And Tech. Pantnagar, India 8-10 Nov., 2000.
  • P. R. Deshmukh, K. J. Rangra and O. P. Wadhawan, “Resist debris formation and proximity exposure effect in electron beam lithography”, Jou. Vac. Sci. Tech B 18 (2) March –April 2000.
  • K J Rangra, Deshmukh and Wadhawan OP, “High Density silicon micro-tip arrays for field emission applications”, IWPSD-1999, December 1999, New Delhi.
  • P. R. Deshmukh, K. J. Rangra and O.P. Wadhawan, “Resist Debris formation in Electron Beam lithography”, Vacuum, Vol. 52, 1999.
  • P. R. Deshmukh, Singh M, K. J. Rangra, P. D. Vyas, W.S. Khokhle and B.B. Pal, “Phenomenon of resist debris formation in electron beam lithography and its possible applications”, Vacuum, Vol. 47, 1996.
  • P. R. Deshmukh, M. Singh, K. J. Rangra, P. D. Vyas , W. S. Khokhle and B. B. Pal, “Phenomenon of resist debris formation in electron beam lithography and the fabrication of arrays of closely spaced metal quantum dots”, Proc. Of International Workshop on Physics of Semiconductor Devices (IWPSD), New Delhi, India 1993.
  • P. R. Deshmukh, M. Singh, K. J. Rangra, P. D. Vyas, W. S. Khokhle and B. B. Pal, “Proximity exposure compensation and resist debris formation in electron beam lithography”, Jou. Vac Sci. Tech., Vol. 10(1) 1992.
  • K. J. Rangra, N. K. L. Raja and V. G. Karakre, “SEM-Voltage contrast, as a tool for measurements of circuit parasitic”, Microelectronics Engineering, Vol. 11(1990) pp. 367-370.
  • N. K. L. Raja, K. J. Rangra and V. G. Karakre, “Online exposure dose correction during electron beam pattern” , Microelectronics Engineering, Vol. 11(1990)
  • N. K. L. Raja, K. J. Rangra and V. G. Karakre, “ A SEM-Image processing method for recognition and fast location of IC registration marks”, Microelectronics Engineering, Vol. 11(1990) pp 681-685
  • K. J. Rangra, V.G. Karakre and N.K.L. Raja, “SEM- Voltage contrast a flexible tool for IC Testing”, National Scanning Electron Microscopy Conference, North-Eastern University, Shillong, India, October 6-8, 1988.

2007

  • V. K. Khanna, Mahanth Prasad, V. K. Dwivedi, Chandra Shekhar, Pankaj, A. C., and Basu, J., “Design and Electro-thermal Simulation of a Polysilicon Microheater on a Suspended Membrane for Use in Gas Sensing”, Indian Journal of Pure & Applied Physics, vol.45, pp 332-335, April 2007.
  • Mahesh Kumar, Mahanth Prasad, NiranjanaGoswami, Anil Arora, B. D. Pant, V. K. Dwivedi, “Deposition of low stress polysilicon thin films using low-pressure chemical vapour deposition”, Indian Journal of Pure & Applied Physics, vol.45, , pp. 400-402, April 2007.
  • B. D. Pant, Mahesh Kumar, Subha Lakshmi, Anil Arora, Mahanth Prasad, Akshdeep Sharma, Mohan Patel, S. Radhakrishnan,V. K. Dwivedi, “Fabrication of MEMS composite-polymer gas sensor arrays for electronic nose”, Indian Journal of Pure & Applied Physics, vol.45, pp. 321-325, April 2007.
  • V. K. Khanna, Mahanth Prasad, V. K. Dwivedi,Chandra Shekhar, M. K. Sharma and Subha Lakshmi, “Milliwatt – Power Hotplates for Metal Oxide Gas Sensors Fabricated by MEMS Technology”, Proceeding of International conference on Emerging Mechanical Technology Micro to Nano (EMTM2M ), Page 126-132, 16-18, Feb 2007, BITS Pilani.
  • Mahanth Prasad,V. K. Khanna, M. K. Sharma, V. K. Dwivediand Chandra Shekhar, “TCR measurement of Polysilicon microheater,” National conference on Nano Bio and information technology Integration, Sanjay Institute of Engineering and Management, Mathura, abstract, pp. 20 , march 23-25, 2007.
  • Mahanth Prasad, V. K. Khanna, M. K. Sharma, SubhaLaxmi, Ram Gopal and V. K. Dwivedi “Thermal Characterization of Polysilicon Microheater Fabricated on Bulk-Micromachined Hotplate” 2nd ISSS National Conference on MEMS, Microsensors, Smart Materials, Structures and Systems, CEERI, Pilani, Abstract 56, page 40, 16-17 Nov. 2007.
  • Mahanth Prasad,V. K. Khanna,V. K. Dwivedi and Vijay Kumar “Design of Pt-based Microhotplate and Simulation of its Temperature Distribution with Applied Voltage” 2ndISSS National Conference on MEMS, Microsensors, Smart Materials, Structures and Systems, CEERI, Pilani, Abstract C-88, page 57, 16-17 Nov. 2007.
  • Mahanth Prasad, V. K. Khanna and V. K. Dwivedi, “Study of Platinum lift-off process and Fabrication of Microhoplate Array for gas sensing application”, DAE Solid State Physics Symposium, pp. 407-408, December 27-31, 2007.

2006

  • V. K. Khanna, Mahanth Prasad, Ashok Suhag, M. K. Sharma, V. K. Dwivedi, and Chandra Shekhar, 2006, “Study of Crucial Processes in the Fabrication of MEMS Hotplate Sensor Structure”, Proceedings of ISSS-MEMS2006, National Conference on Smart Structures and MEMS Systems for Aerospace Applications, RCI, DRDO, Hyderabad, India, pp.1-6, 1-2 December, 2006.
  • V. K. Dwivedi, Ram Gopal,B. D. Pant, Mahesh Kumar, Mahanth Prasad, Subha Lakshmi, Sunil Kumar, Anil Arora, Arti Arora, “Batch fabrication of MEMS technology based pressure sensors”,Proceedings of ISSS-MEMS 2006, National Conference on Smart Structures and MEMS Systems for Aerospace Applications, RCI, DRDO, Hyderabad, India, AB-15,1-2 December, 2006.
  • V. K. Khanna, Mahanth Prasad, Ashok Suhag,Y. K. Jain,V. K. Dwivedi, and Chandra Shekhar,“MEMS-and Semiconductor Technology-Based Generic Structures for the Fabrication of High-Performance Chemical Sensors”, National Conference on Sensors and Actuators: Emerging Technological Challenges, CGCRI, Kolkata, Dec. 21-22, 2006, Abstracts, p.11, Invited Lecture I-06.