Smart Sensors

Process Technologies

2017

Journals

  • Jain and R. Gopal, “Structural design of torsional micro-gyroscope having robust drive and sense modes,” Microsystem Technologies, doi: 10.1007/s00542-016-3157-z.
  • Surender P. Gaur, Prateek Kothari , K. Maninder , Prem Kumar , Kamaljit Rangra, Dinesh Kumar,” Development and integration of near atmospheric N2 ambient sputtered Au thin film for enhanced infrared absorption”, Infrared Physics & Technology , March 2017, DOI: 10.1016/j.infrared.2017.03.013
  • Shilpi Pandey, Prateek Kothari, Sunil Kumar Sharma, Seema Verma, K. J. Rangra, “Impact of post deposition annealing in N2 ambient on structural properties of nanocrystalline hafnium oxide thin film”, Journal of Materials Science: Materials in Electronics, 2017, DOI 10.1007/s10854-016-5587-x.
  • Mohit Kumar, Vijendra Singh Bhati, Sapana Ranwa, Jitendra Singh & Mahesh kumar, “Pd/ZnO nanorods based sensor for highly selective detection of extremely low concentration hydrogen” Nature Scientific Reports 7, 236 (2017).
  • P.K. Kulriya, Mohit Kumar, Jitendra Singh, D.K. Avasthi, “ Hydrogen pressure dependent in-situ electrical studies on Pd/C nano-composite” International Journal of Hydrogen Energy, Volume 42, Issue 5, (2017) Pages 3399–3406

Conferences (International /National)

  • S. Santosh Kumar, Anuj Kumar Ojha and B. D. Pant, “Design Considerations, Fabrication and Characterization of a Polysilicon Piezoresistive Absolute Pressure Sensor with Bulk Micromachined Diaphragm”, 2nd International Symposium on Physics & Technology of Sensors (ISPTS – 2015), March 8-10, 2015, Pune.
  • Aneesha Srivastava, S. Santosh Kumar, Anuj Kumar Ojha and B. D. Pant, “A Comparative Study of Conventional and Optimized Piezoresistor Placement in Barometric Pressure Sensor”, 2nd International Symposium on Physics & Technology of Sensors (ISPTS – 2015), March 8-10, 2015, Pune.
  • S. Santosh Kumar and B. D. Pant, “Fabrication and Characterization of Pressure Sensor, and Enhancement of Output Characteristics by Modification of Operating Pressure Range”, 19th International Symposium on VLSI Design and Test (VDAT – 2015), June 26-29, 2015, Ahmedabad.
  • Ramprasad Nambisan, S. Santosh Kumar and B. D. Pant, “Sensitivity and Non-linearity Study and Performance Enhancement in Bossed Diaphragm Piezoresistive Pressure Sensor”, 19th International Symposium on VLSI Design and Test (VDAT – 2015), June 26-29, 2015, Ahmedabad.
  • S. Santosh Kumar, Anuj K. Ojha, Manish Kumar and B. D. Pant, “Comparative Study of Characteristics of Polysilicon Pressure Sensor with Different Diaphragm Sizes and Piezoresistor Configurations”, 2nd International Conference on Emerging Technologies- Micro to Nano (ETMN), Oct. 24-25, 2015, Jaipur, India.
  • Kavindra Kandpal, Jitendra Singh, Chandra Shekhar, and Navneet Gupta “Deposition and Characterization of un-doped ZnO Thin Film for Display applications” International Conference on Thin Films (ICTF-2017) 13-17 November 2017 at NPL, New Delhi.
  • Jitendra Singh, Priyanka Joshi, Ravindra Singh, Ramakant Sharma, Prateek Kothari, Arvind Kumar Singh and Jamil Akhtar, “ZnO Thin Film Based MEMS Piezoelectric Resonator on Silicon” ISSS International Conference on Smart Materials, Structures and Systems, July 5-7, 2017, Bangalore, India.

2016

Journals

  • Jain and R. Gopal, “Reliability testing of Ni-Fe as structural material in MEMS gyroscope,” vol. 15, no. 4 , 040501, 2016.
  • Shilpi Pandey, Prateek Kothari, Sunil Kumar Sharma, Seema Verma, K. J. Rangra, “Impact of post deposition annealing in O2 ambient on structural properties of nanocrystalline hafnium oxide thin film”, Journal of Materials Science: Materials in Electronics, 2016, DOI 10.1007/s10854-016-4663-6.
  • S. Santosh Kumar, Anuj K. Ojha, and B.D. Pant, “Experimental evaluation of sensitivity and non-linearity in polysilicon piezoresistive pressure sensors with different diaphragm sizes”, Microsyst. Tech., vol. 22, no. 1, pp. 83-91, January 2016. DOI: 10.1007/s00542-014-2369-3.
  • S. Santosh Kumar, and B.D. Pant, “Effect of piezoresistor configuration on output characteristics of piezoresistive pressure sensor: an experimental study”, Microsyst. Tech., vol. 22, no. 4, pp. 709-719, April 2016. DOI: 10.1007/s00542-015-2451-5.
  • Jitendra Singh, R Shukla, A Bagri, RS Dhaka, J Akhtar, “Magnetization enhancement due to incorporation of non-magnetic nitrogen content in (Co84Zr16) Nx nano-composite films” AIP Advances 6 (1), 015307 (2016).
  • Surendra Singh Barala, Jitendra Singh, Mohit Kumar, Mahesh Kumar, “High Tolerance of BST Thin Film Based Varactor Under Neutron Irradiation” IEEE Transactions on Electron Devices, Vol. 99, 1 (2016).
  • R. Agarwal, R. Mukhiya, R. Sharma, M.K. Sharma, and A.K. Goel, “Finite Element Method-based Design and Simulations of Micro-cantilever Platform for Chemical and Bio-sensing Applications”, Defence Science Journal, Vol. 66, No. 5, September 2016, pp. 485-488, DOI : 10.14429/dsj.66.10702.

Conferences (International /National)

  • Shilpi Pandey, Deepak Bansal, Deepak Panwar, Neha Shukla, Arvind Kumar, Prateek Kothari, Seema Verma and K. J. Rangra, “Low cost lift-off process optimization for MEMS applications” , AIP Conf. Proc. 1724, 020105 (2016).
  • Deepak Bansal, Anuroop, Prem Kumar , Maninder Kaur, Surender Gaur, Prateek Kothari, Arvind K Singh and Kamaljit Rangra, “Change of Characteristic Length with Packaging for Torsional MEMS Switch”, AIP Conf. Proc. 1724, 020030 (2016).Doi- 10.1063/1.4945150.
  • Vishwas Saini, Rajkumar Dutta Ferrofluids: Preparation, Characterization, Stability Study and Rheology. International Conference on Advanced Materials: ICAM-2016, IIT Roorkee, India, March 04-07, 2016.
  • Jitendra Singh, Ramakant Sharma, Gunjan Kumari, and Ravindra Singh, “Piezoelectric ZnO thin film based Film Bulk Acoustic wave Resonator (FBAR)” Conference on Emerging Materials (CEMAT 2016) held at IISc Bangalore, July 18-19 2016.
  • Jitendra Singh, Ravindra Singh, Gunjan Kumari, and Ramakant Sharma, “Low stress ZnO thin film based BAW resonator” National Conference on “Semiconductor Materials and Devices”, held at IIT Jodhpur during March 4-6, 2016.
  • Sachin Dhariwal, Jitendra Kumar, Jitendra Singh and Jamil Akhtar “Morphological co-relation of reactive sputtered soft magnetic NiFe2O4 nanocomposite thin films for electrical and magnetic properties” IEEE International Symposium on Electronics and Smart Devices. ISESD 2016 is held in Bandung, Indonesia on November 29 – 30, 2016.

2015

Journals

  • Jain, C. Shekhar, and R. Gopal, “Fabrication of two-gimbal Ni–Fe torsional micro-gyroscope by SU-8 based UV-LIGA process,” Microsystem Technologies, vol. 21, no. 7, pp. 1479-1487, 2015.
  • Jain and R. Gopal, “Novel design concept of torsional gyroscope with robust drive mode and its implementation,” Microsystem Technologies, vol. 21, no. 10, pp. 2197-2206, 2015.
  • Jain, H. K. Sharma, and R. Gopal, “Architecture of torsional gyroscope having robust sense mode,” Journal of Micro/Nanolithography, MEMS, and MOEMS, vol. 14, no. 4, 2015.
  • N. Purushothaman, A. Jain, W. R. Taube, R. Gopal, S. K. Ghosh, “Modeling and fabrication studies of negative permeability metamaterial for use in waveguide applications,” Microsystem Technologies, vol. 21, no. 11, pp. 2415-2424, 2015.
  • S. Santosh Kumar, and B.D. Pant, “A Study of Analytical Solutions of Plate Equation for Pressure Microsensor Diaphragm: Limitations, Comparison and Usage”, Journal of Microelectronics, Electronic Components and Materials (Informacije MIDEM), vol. 45, no. 1, pp. 80-86, March 2015.
  • Sharma, R. Mukhiya, S. Santosh Kumar and B. D. Pant, “Dynamic characterization of bulk micromachined accelerometer using laser doppler vibrometer (LDV)”, Microsyst. Tech., vol. 21, no. 10, pp. 2221-2232, October 2015. DOI: 10.1007/s00542-014-2316-3.
  • S. Santosh Kumar, and B.D. Pant, “Polysilicon thin film piezoresistive pressure microsensor: design, fabrication and characterization”, Microsyst. Tech., vol. 21, no. 9, pp. 1949-1958, September 2015. DOI: 10.1007/s00542-014-2318-1
  • Jitendra Singh, Sapana Ranwa, Jamil Akhtar and Mahesh Kumar “Growth of residual stress-free ZnO films on SiO2/Si substrate at room temperature for MEMS devices”, AIP Advances 5, 067140 (2015).
  • Surendra Singh Barala, Jitendra Singh, Sapana Ranwa, Mahesh Kumar “Radiation Induced Response of Ba0.5Sr0.5TiO3Based Tunable Capacitors Under Gamma Irradiation” IEEE Transactions on Nuclear Science Vol. 62, NO. 4, (2015).
  • Monika Poonia, V. Manjuladevi, R. K. Gupta, Sanjeev K. Gupta, Jitendra Singh, Pankaj B. Agarwal, and Jamil Akhtar, “Ultrathin Films of Single-Walled Carbon Nanotubes: A Potential Methane Gas Sensor”, Sci. Adv. Mater. 7, 455-462 (2015).
  • Sapana Ranwa, Mohit Kumar, Jitendra Singh, Mattia Fanetti and Mahesh Kumar “Schottky-contacted vertically self-aligned ZnO nanorods for hydrogen gas nanosensor applications”, J. Appl. Phys. 118, 034509 (2015).
  • Sachin Kumar, Snehasis Bhunia, Jitendra Singh, Animesh K. Ojha “Absence of room temperature ferromagnetism in Fe stabilized ZrO2 nanostructures and effect of Fe doping on its structural, optical and luminescence properties” Journal of Alloys and Compounds, Volume 649, Pages 348–356, 15 November 2015.
  • R. Mukhiya, R. Gopal, B. D. Pant, V. K. Khanna, T. K. Bhattacharyya, “Design, Modeling And FEM-Based Simulations Of A 1-Dof MEMS Bulk Micromachined Piezoresistive Accelerometer”, Microsystem Technologies, Vol. 21, Issue 10, Oct. 2015, pp 2241-2258.
  • Sharma, R. Mukhiya, S. Santosh Kumar, R. Gopal, B. D. Pant, “Dynamic Characterization Of Bulk Micromachined Accelerometer Using Laser Doppler Vibrometer (LDV)”, Microsystem Technologies, Vol. 21, Issue 10, Oct. 2015, pp 2221-2232.
  • R. Mukhiya, Aditi, K. Prabakar, M. Raghuramaiah, J. Jayapandian, Ram Gopal, V. K. Khanna, and Chandra Shekhar, “Fabrication of Capacitive Micromachined Ultrasonic Transducer Arrays with Isolation-Trenches using Anodic Wafer Bonding”, IEEE Sensors Journal, Vol. 15, No. 9, Sep. 2015, pp 5177-5184.
  • R. Mukhiya, R. Sharma, V. K. Khanna, A. Adami, L. Lorenzelli, M. Zen, “RF-Sputtered, Nanostructured ZnO-Based Extended-Gate Field-Effect Transistor as pH Sensor”, Sensor Letters, Vol. 13, No. 1, pp 26–31, 2015.

Conferences (International /National)

  • A. Jain and R. Gopal, “Electrostatic tuning of drive and sense modes in two-gimbal torsional gyroscope,” 2nd International Conference on Emerging Technologies: Micro to Nano, Jaipur, India, 2015.
  • A. Jain, S. Das, D. Kumar, and R. Gopal, “LDV characterization of vacuum packaged torsional gyroscope for MAV,” 18th International Workshop on the Physics of Semiconductor Devices, Bangalore, India, pp. 536, 2015.
  • Vishwas Saini, Rajkumar Dutta Synthesis, Characterization, and Rheological study of ZnO Nanofluids. Indo-UK workshop on Micro-Nano Fluidics for health and diagnostics: FluidicsHD, CSIR-CEERI, Pilani, India, August 27-28, 2015.
  • Jitendra Singh, Yoginder Kumar, Ravindra Singh, Gunjan Kumari, Deepak Kumar, Ravi Raj Bhatia, Prateek Kothari and Jamil Akhtar, “Piezoelectric ZnO thin films for fluidics micro-pump applications” Indo-UK workshop on Micro Nano Fluidics for Health & Diagnostics At CSIR-CEERI, Pilani on Aug 27 – 28, 2015 (2015).
  • Yoginder Kumar, Jitendra Singh“Design of ZnO Based Bulk Acoustic Wave Resonator” International Conference on Communication Systems (ICCS-2015) held at BKBIET Pilani during October 18-20, 2015 ICCS-2015.
  • Yoginder Kumar, Jitendra Singh, Gunjan Kumari, Ravindra Singh, Jamil Akhtar, “Effect of shapes and electrode material on figure of merit (FOM) of BAW resonator”, 2nd Intrnational Conference on Emerging Technologies: Micro to Nano 2015 (ETMN-2015), Volume 1724, Issue 1, Page 020045, Publisher: AIP Publishing.
  • Priyanka Joshi, Jitendra Singh, Surajit Das, JV Desai, Jamil Akhtar, “Electrical performance of Ti-ZnO-Au thin film composite structure for device application” 2nd International Conference on Emerging Technologies: Micro to Nano 2015 (ETMN-2015), Volume 1724, Issue 1, Page 020070, Publisher: AIP Publishing.
  • R. Sharma, R. Mukhiya, V.K.Khanna, A. Adami, L. Lorenzelli, M. Zen, “ZnO-based EGFET Platform for Biological Sensing Applications”, Conference on Microscopy in Material Science and Biomimetic Technology, India, Feb. 26-28, P-144, 2015.
  • M Nitharwal AChaturvedi S. Sinha, R. Mukhiya, R. Sharma, V.K. Khanna, “Temperature Drift Analysis of ISFET using On-Chip Fabricated MOSFET”, 2nd International Symposium on Physics and Technology of Sensors, India, March 8-10, P-154-155, 2015.
  • S. Sinha, R. Rathore, A. Sharma, R. Mukhiya, R. Sharma, V.K. Khanna, “Simulation, Fabrication and Characterization of Dual-Gate MOSFET Test Structures”, 2nd International Symposium on Physics and Technology of Sensors, India, March 8-10, P-156-157, 2015.

2014

Journals

  • Jain and R. Gopal, “2-DOF vibratory gyroscope fabricated by SU-8 based UV-LIGA process,” Microsystem Technologies, vol. 20, no. 7, pp. 1291-1297, 2014.
  • Jain and R. Gopal, “Formation of thick SU-8 mold for the fabrication of UV-LIGA based nickel micro-gyroscope structures,” Inf. MIDEM, vol. 44, no. 4, pp. 330-335, 2014.
  • S. Santosh Kumar, and B.D. Pant, “Design principles and considerations for the ‘ideal’ silicon piezoresistive pressure sensor: a focused review”, Microsyst. Tech., vol. 20, no. 7, pp. 1213-1247, July 2014. DOI: 10.1007/s00542-014-2215-7.
  • Jitendra Singh, Arvind K. Singh, Sanjeev K. Gupta, J. Akhtar “Structure and Magnetic Properties Investigation of CoZr and CoZrN Thin Films” Applied Mechanics and Materials Vol. 464 pp 83-88 (2014).
  • Jitendra Singh, William Ringal Taubea, Akhtar Saleem Ansari, Sanjeev Kumar Gupta, Pawan Kumar Kulriya, Jamil Akhtar, “Exchange bias and anisotropy analysis of nano-composite Co84Zr16N thin films” Journal of Magnetism and Magnetic Materials, Vol. 378, No. 6, pp. 164-169, (2014).
  • Jitendra Singh, Sanjeev K. Gupta, Bhawani Shankar, William R. Taube, J. Akhtar, “Capacitance–conductance spectroscopic investigation of interfacial oxide layer in Ni/4H–SiC (0 0 0 1) Schottky diode”, Physica B: Condensed Matter 01/2014; 434:44–50 (2014).

Conferences (International /National)

  • Jain and R. Gopal, “Design and fabrication of non-resonant micro-gyroscope,” ISSS International Conference on Smart Materials, Structures and Systems, Bangalore, India, 2014.
  • H. K. Sharma, A. Jain, and R. Gopal, “Estimation of slide film damping in laterally moving micro-structures using FEM simulations,” National Conference on Innovations in Microelectronics, Signal Processing and Communication Technologies, Jaipur, India, pp. 20-21, 2014.
  • Hemant S Ajal, Rahul Parmar, Sanjeev K Gupta,Prateek Kothari, Jitendra Singh and J Akhtar“Influence of process induced wafer bow on structural properties of boron doped LPCVD Polysilicon film” Proceedings of the International Conference on Nano Science and Nanotechnology( Aligarh Nano 2014).
  • S. Santosh Kumar, Anuj Kumar Ojha and B. D. Pant, “Effect of Orthotropic Properties and Clamping Condition of Diaphragm on the Output of Silicon Piezoresistive Pressure Sensors”, 6th ISSS International conference on Smart Material Structures and Systems (ISSS-2014), Jul. 8-11, 2014, Bangalore.
  • Amit Sharma, Ravindra Mukhiya, S. Santosh Kumar and B. D. Pant, “CMOS Compatible Bulk Micromachining for MEMS Accelerometer”, 6th ISSS International conference on Smart Material Structures and Systems (ISSS-2014), Jul. 8-11, 2014, Bangalore.
  • R. Nambisan, S. Santosh Kumar, R. Mukhiya, and B. D. Pant, “A Bossed Diaphragm Pressure Sensor Using Wet Bulk Micromachining for Barometric Applications: Design Aspects,” International Conference on MEMS and Sensors (ICMEMSS 2014), Dec. 18-20, 2014, Chennai.
  • Ramprasad Nambisan, S. Santosh Kumar and B. D. Pant, “FEM based design and simulation of a highly linear pressure microsensor”, 3rd National conference on Advances in Metrology (AdMet-2014), Feb. 19-21, 2014, Patiala, Punjab.
  • Jitendra Singh, Mohd. Shibly, Ravindra Singh, S. K. Choudhary and J. Akhtar “Optimization of High Piezoelectric ZnO Thin Film for Acoustic Sensor Applications” , International Conference on Emerging Electronics (ICEE-2014), 3-6 Dec. 2014, IISc Bangalore.
  • Jitendra Singh, and J. Akhtar, “ZnO Thin Film for Sensing Applications”, National Conference on Nano and Functional Materials (NFM-2014), 7-8 Nov. 2014, BITS Pilani, Pilani, Rajasthan.
  • R.Nambisan, S. Santosh Kumar, R. Mukhiya, B. D. Pant, “A Bossed Diaphragm Pressure Sensor Using Wet Bulk Micromachining for Barometric Applications: Design Aspects”, International Conference on MEMS and Sensors (ICMEMSS 2014), India, Dec. 18-20, PS.1, 2014.
  • R. Sharma, R. Mukhiya, S. Sinha, S.K.Sinha, V.K.Khanna, “Silicon Nitride-based Ion-Sensitive Field-Effect Transistor”, International Conference on MEMS and Sensors (ICMEMSS 2014), India, Dec. 18-20, PS.1.31, 2014.
  • Soumendu Sinha, Snigdha Shakya, Ravindra Mukhiya, Ram Gopal, B.D. Pant, “Design and Simulation of MEMS Differential Capacitive Accelerometer”, ISSS, 7th International Conference on Smart Materials, Structures and Systems, India, July 8-11, P-47, 2014.
  • S. Sinha, R. Rathore, S.K. Sinha, R. Sharma, R. Mukhiya, V.K. Khanna, “Modeling and Simulation of ISFET Microsensor for Different Sensing Films”, ISSS, 7th International Conference on Smart Materials, Structures and Systems, India, July 8-11, P-47, 2014.
  • Sharma, R. Mukhiya, S. Santosh Kumar, B.D. Pant, “CMOS Compatible Bulk Micromachining for MEMS Accelerometer”, ISSS, 7th International Conference on Smart Materials, Structures and Systems, India, July 8-11, P-47, 2014.
  • A Sharma, R Rathore, S Sinha, R Mukhiya, R Sharma, V K Khanna, “Process design of a nanowire ion-sensitive field-effect transistor platform for chemical/biochemical sensors”, International conference ICOL-2014, India, 5-8 March, PP-MNT-12, P-211, 2014.
  • S K Sinha, R Rathore, S Sinha, R Sharma, R Mukhiya, V K Khanna, “Process design and simulation of an ion-sensitive field-effect transistor platform for chemical/biochemical sensors”, International conference ICOL-2014, India, 5-8 March, PP-MNT-08, P-207, 2014.

Book chapters

  • Micro and Smart Devices and Systems; Chapter: 5 “Design and Development of an Ion-Sensitive Field-Effect Transistor and Extended-Gate Field-Effect Transistor Platforms for Chemical and Biological Sensors”, V. K. Khanna, R. Mukhiya, R. Sharma, P. K. Khanna, S. Kumar, D. K. Kharbanda, P. C. Panchariya and A. H. Kiranmayee, Springer India, 2014.

2013

Journals

  • Sanjeev K Gupta, Jitendra Singh, K. Anbalagan, Prateek Kothari, Ravi, Raj Bhatia, Pratima K. Mishra, V. Manjuladevi, Raj K. Gupta, J. Akhtar “Synthesis, phase to phase deposition and characterization of rutile nanocrystalline titanium dioxide (TiO2) thin films” Applied Surface Science , vol. 264(1), 737-742 (2013).

Conferences (International /National)

  • A. Jain and R. Gopal, “Design and simulation of structurally decoupled 4-DOF MEMS vibratory gyroscope,” 26th International Conference on VLSI Design, Pune, India, pp. 380-385, 2013.
  • A. Jain and R. Gopal, “Analytical modeling and design optimization of UV-LIGA based 4-DOF vibratory gyroscope,” International Conference on Emerging Technologies – Micro to Nano, Goa, India, pp. 109-110, 2013.
  • G. Sheoran, W. R. Taube, A. Jain, and A. Kumar, “Modeling and 2D FDTD simulation of a novel NOEMS accelerometer,” International Conference on Emerging Technologies – Micro to Nano, Goa, India, pp. 109-110, 2013.
  • H. K. Sharma, A. Jain, and R. Gopal, “FEM simulations for estimating squeeze film damping in micro-structures,” International Conference on Advance Trends in Engineering and Technology, Jaipur, India, pp. 112-114, 2013.
  • 6.Saroj K Patra, Sonachand Adhikari, Sumitra Singh, Pawan Kumar, Ashok K Gupta, Prateek Kothari, Maninder Kaur, Prem Kumar, Kuldip Singh, Suchandan Pal and C Dhanavantri, “Micro-patterning of sapphire substrate by wet and dry etching: realization and characterization ,in TAPSUN Conference 2013 on advances in futuristic solar energy materials and technologies, CSIR-CLRI, Chennai, Sept. 13 – 14, 2013.
  • Jitendra Singh, Sanjeev K. Gupta, Arvind K. Singh, B.C. Pathak, A.K. Gupta, Deepak Panwar, Surajit Das, R.K. Sharma, V. Saini, Banwari Lal, G.S. Negi and J. Akhtar Role of Nitrogen in soft magnetic properties of Nanocomposite CoZrN thin films. International Conference on Emerging Technologies: Micro to Nano 2013 (ETMN-2013), BITS, Pilani, Goa campus, Goa, India, February 23-45, 2013.
  • S. Santosh Kumar and B. D. Pant, “Effect of temperature on etch rate and undercutting of (100) silicon using 25% TMAH”, International Conference on Emerging Technologies- Micro to Nano (ETMN), Feb. 23-24, 2013, Goa, India.
  • Amit Sharma, Ravindra Mukhiya, S. Santosh Kumar and B.D. Pant, “Design and simulation of bulk micromachined accelerometer for avionics application”, International Symposium on VLSI Design and Test (VDAT 2013), Jul. 27-30, 2013, Jaipur, India. Published in Communications in Computer and Information Science (CCIS) 382, pp. 94–99. Springer, Heidelberg (2013)
  • S. Santosh Kumar, Anuj Kumar Ojha, Ramprasad Nambisan, Anil Kumar Sharma and B.D. Pant, “Design and simulation of MEMS silicon piezoresistive pressure sensor for barometric applications”, International conference on advances in recent technologies in Electrical and Electronics (ARTEE) 2013, Sep. 20-21, 2013, Bangalore, India. Published in proc. ARTCom&ARTEE PEIE&itSIP and PCIE, pp. 339-345, Elsevier, ISBN 978-81-910691-8-3.
  • S. Santosh Kumar, and B.D. Pant, “Design considerations for SOI piezoresistive pressure sensor”, 6th ISSS National conference on MEMS, Smart Material, Structure and System, Sep. 6-7, 2013, Pune, India.
  • Jitendra Singh, Sanjeev K. Gupta, Arvind K. Singh and J. Akhtar “Role of Nitrogen in soft magnetic properties of Nanocomposite CoZrN thin films” International Conference on Emerging Technologies: Micro to Nano 2013 (ETMN-2013), held at Birla Institute of Technical and Science (BITS), Pilani, Goa campus, Goa, India, February 23-25, 2013.
  • Jitendra Singh, Arvind K. Singh, Sanjeev K. Gupta, and J. Akhtar, “Nitrogen doped Co91.5Zr8.5 films for inductive applications” International conference on nano-structuring by ion beams (ICNIB 2013).
  • Sanjeev K. Gupta, Jitendra Singh, B. C. Pathak,A. K. Gupta, Prateek Kothari, Arvind Singh, D. K. Panwar, R. R. Bhatia and J. Akhtar “An extensive fabrication of eight beam configured piezoresistive micro Accelerometer”, International Conference on Emerging Technologies: Micro to Nano 2013 (ETMN-2013), held at Birla Institute of Technical and Science (BITS), Pilani, Goa campus, Goa, India, February 23-45, 2013.
  • Niharika Bhardwaj, Mahendra Nitharwal, Anuj Chaturvedi, R. Mukhiya, Rishi Sharma, V. K. Khanna, “Ta2O5-based extended-gate field-effect transistor as pH sensor”, ISSS 2013 proceeding, India, ISSS NC6, 6-7 September 2013, pp 25.
  • Rishi Sharma, A Adami, R Mukhiya, L Lorenzelli, M Zen, V K Khanna, “Development of MEMS-based chemical/bio-chemical sensors (µTAS): issues and challenges”, IETE national seminar on “Sensors Technology and Applications”, India, 29-30 Aug. 2013, Vol. 03, No. 01, pp K.
  • Amit Sharma, Ravindra Mukhiya, S. Santosh Kumar, B.D. Pant, “Design and simulation of bulk micromachined accelerometer for avionics application”, 17th Inter-national Symposium on VLSI Design and Test (VDAT2013), Jaipur, India, 27-30 July 2013.

Book chapters

  • Sanjeev Kumar Gupta, Jitendra Singh, Jamil Akhtar, “Chapter: Materials and Processing of Gate Dielectric on Silicon Carbide (SiC) Surface, Physics and Technology of Silicon Carbide Devices”, InTech open access., ISBN: 980-953-307-585-8, (2013).

2012

Journals

  • Sanjeev K. Gupta, Jitendra Singh, Anbalagan .K, Prateek Kothari, Ravi Raj Bhatia, Pratima K.Mishra1, Manjuladevi V., Raj K. Gupta and J. Akhtar “Synthesis, phase to phase deposition and characterization of rutile nanocrystalline titanium dioxide (TiO2) thin films “, Applied Surface science (2012), Volume 264, 1 January 2013, Pages 737–742.
  • Jitendra Singh, Sanjeev K. Gupta, Arvind K. Singh, Prateek Kothari, R.K. Kotnala and J. Akhtar,“Investigation of structural and magnetic properties of Ni, NiFe and NiFe2O4 thin films”, Journal of Magnetism and Magnetic Materials, Volume 324, Issue 6, March 2012, Pages 999–1005
  • William R. Taube, A. Kumar , R. Saravanan, P.B. Agarwal, P. Kothari, B.C. Joshi, D. Kumar,Efficiency enhancement of silicon solar cells with silicon nanocrystals embedded in PECVD silicon nitride matrix, Solar Energy Materials and Solar Cells, Elsevier, Volume 101, June 2012, Pages 32–35
  • A. Kumar, W.R. Taube, R. Saravanan, P.B. Agarwal, P. Kothari, D. Kumar, Plasma Enhanced Chemical Vapor Deposited (PECVD) Silicon-Rich-Nitride Thin Films For Improving Silicon Solar Cells Efficiency, International Journal of Scientific, Engineering and Technology, Volume 1 Issue 4, October 2012, Pages 111-116
  • Jitendra Singh, S.K. Gupta, Arvind K Singh, Prateek Kothatri,R.K. Kotnala and Jamil Akhtar, Investigatin of structure and magnetic properties of Ni, NiFe and NiFe2O4 films, Journal of Magnetism and Magnetic Materials, Vol. 324, No. 6, pp. 999-1005 2012.
  • R. Mukhiya, Atul Kumar, S. V. Kamat, T.K.Bhattacharyya, “Static Characterization of Bulk Micromachined Accelerometer Structure using a Nanoindenter”, Materials Science in Semiconductor Processing, Vol. 15, 353-358, 2012.
  • R Mukhiya, Ram Gopal, V K Khanna, TK Bhattacharyya, “<310> Triangular corner compensation and etch flow mechanism for anisotropic TMAH etching of (100) silicon”, National Journal on Technology and Management, AISECT University, Bhopal, Vol. 1, Issue 1. March 2012, pp 11-14.
  • Rishi Sharma, R Mukhiya, V K Khanna, “Organic materials for microsensors application: a brief review”, National Journal on Technology and Management, AISECT University, Bhopal, Vol. 1, Issue 1. March 2012, pp 15-18.

Conferences (International /National)

  • Sanjeev K. Gupta, Jitendra Singh, Anbalagan .K, Prateek Kothari, Ravi Raj Bhatia, Pratima Mishra1, Manjuladevi V.2, Raj K Gupta2 and J. Akhtar, “E-beam evaporation assisted titanium oxide thin film deposition and structural characterization for futuristic device applications”National Conference on Condensed Matter Physics, BITS Pilani, February 24-25, 2012
  • Jitendra Singh , Sanjeev K. Gupta, Arvind K Singh, Prateek Kothari and J. Akhtar, “Processcontrolled uniaxial magnetic anisotropy in NixFe100-x thin films”National Conference on Condensed Matter Physics, BITS Pilani, February 24-25, 2012
  • Sheba Jamil, Jitendra Singh, Arvind K. Singh, Prateek Kothari, Sanjeev K. Gupta, K. Anbalagan,N.N. Sharma and J. Akhtar, “Reactive sputter deposition of c-axis oriented ZnO thin films for sensing applications”, International Conference on Naoscience and Technology (ICONSAT – 2012),January 20-23, 2012, ARCI, Hyderabad, India.
  • S. Santosh Kumar, and B.D. Pant, “Design of piezoresistive MEMS absolute pressure sensor”, 16th International Workshop on Physics of Semiconductor Devices (IWPSD-2011), Dec. 19-22, 2011, Proc. SPIE 8549, 85491G (October 15, 2012); doi:10.1117/12.923644, Kanpur, India.
  • Jamil Akhtar, Sanjeev K. Gupta, Jitendra Singh and R. K. Gupta, “Ni-Fe nanocomposite crystalline thin film with magnetic anisotropy employing e-beam evaporation”, presented at C2C workshop on the Progress in Nanoscience and Materials (C2C Conference-2012), August 13-16, 2012, at Shanghai, China. [Oral].
  • Jitendra Singh, Sanjeev K. Gupta, Arvind K. Singh, Prateek Kothari and J. Akhtar “Process Controlled uniaxial magnetic anistropy in NixFe100-x thin films”, presented at National Conference on National Conference on Condensed Matter Physics (NCCMP-2012), February 24-25 at Birla Institute of Technical and Science (BITS), Pilani, India [Poster].
  • Sheba Jamil, Jitendra Singh, Arvind K. Singh, Prateek Kothari, Sanjeev K. Gupta, K. Anbalagan, N. N. Sharma and J. Akhtar, “Reactive sputter deposition of c-axis oriented ZnO thin film for sensing applications”, International conference on nano science and technology (ICONSAT-2012), January 20-23, 2012 at Indian International Advanced Research Center for Power metallurgy and new materials (ARCI), Hyderabad, India [Oral].
  • Deepika Jhajhria, Santwana Thakuria, Runumoni Deori, Jitendra Singh and J. Akhtar, “Design and Simulation of RF Integrated Circular Spiral Inductors”January 24-25, 2012, VLSI, MEMS and NEMS 2012 at Amity University, Noida.
  • Sanjeev K. Gupta, Jitendra Singh, Anbalagan .K, Prateek Kothari, Ravi Raj Bhatia, Pratima Mishra1, Manjuladevi V.2, Raj K Gupta2 and J. Akhtar, “E-beam evaporation assisted titanium oxide thin film deposition and structural characterization for futuristic device applications”National Conference on Condensed Matter Physics, BITS Pilani, February 24-25, 2012.
  • Aditi, R Mukhiya, Ram Gopal, V. K. Khanna, “Design of MEMS-based Ultrasonic Transducer”, National Conference on MEMS and Nano Technology, 14-15 April, 2012, Marudhar Engg. College, Bikaner, India.
  • R Mukhiya, Ram Gopal, V K Khanna, S K Lahiri, T K Bhattacharyya, “Development of CMOS compatible bulk micromachined MEMS accelerometer”, ISSS-2012, 4-7 January, 2012, IISc, Bangalore India.
  • Aditi, R Mukhiya, Ram Gopal, V K Khanna, “Modeling and simulation of MEMS based CMUT cell for NDT application”, ISSS-2012, 4-7 January, 2012, IISc, Bangalore India.

Before 2012

Journals

  • Jitendra Singh, and S. B. Krupanidhi, “Multilayer Bi1.5Zn1.0Nb1.5O7 / Ba0.6Sr0.4TiO3 / Bi1.5Zn1.0Nb1.5O7 thin films for tunable microwave applications”, Applied Surface Science, Volume 257, Issue 6, 2214 (2011).
  • Jitendra Singh, and S. B. Krupanidhi, “Probing disorder in cubic pyrochlore Bi1.5Zn1.0Nb1.5O7 (BZN) thin films”, Solid State Communication, 150, 2257 (2010).
  • Monika Poonia, Sumita Choudhari, Sheba Jamil, Sanjeev Kumar Gupta, Jitendra Singh, Jamil Akhtar, Development of polycrystalline diffused piezoresistors using e-beam evaporation method for MEMS applications, International Journal of Advancements in Technology, Vol 2, No 1 (2011).
  • Jitendra Singh, A. T. Kalghatgi, Jayanta Parui,and S. B. Krupanidhi, “High-temperature dielectric response in pulsed laser deposited Bi1.5Zn1.0Nb1.5O7 (BZN) thin films”, Journal of Applied Physics, 108 54106 (2010).
  • R Mukhiya, A Bagolini, T K Bhattacharyya, L Lorenzelli and M Zen, “Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25% wt. TMAH”, Microelectronics Journal, Vol. 42, issue 1, January 2011, pp 127-134.

Conferences (International /National)

  • Chinmayee Hazarika, K. Anbalagan, Ravi Raj Bhatia, Prateek Kothari and J.Akhtar, “Optimization of front side lateral etching process based on TMAH for micro sensor for absolute pressure and vacuum”, National Conference on Sensors and Actuators: Science to Technology, March 11-12, 2011, CGCRI, Kolkata.
  • Himani Sharma, Apoorva Sharma, B. C. Joshi, Prateek Kothari, S. Dalela, P. A. Alvi, J. Akhtar,”A comprative analysis of SiO2 films deposited by RF-PECVD and APCVD for μ-fluidic applications”, National Symposium on materials for advanced technoloy” March 27-29, 2011,Banasthali University, Rajasthan.
  • Sujit Kr Nayak, Anbalagan K., Apoorva Sharma, Sanjeev K. Gupta, Jitendra Singh and J. Akhtar “Fabrication of micro-inductor using MEMS Technology” presented at National Conference on Sensors and Actuators: Science to Technology (NCSA-2011), March 11-12 at Central Glass and Ceramic Research Institute (CGCRI), Kolkata, India [Poster].
  • Monika Poonia, Sumita Choudhari, Sheba Jamil, Sanjeev K. Gupta, Jitendra Singh and J. Akhtar, “Development of polycrystalline diffused piezoresistors using e-beam evaporation method for MEMS applications” International Journal of Advancements in Technology, Vol. 2, No. 1, pp. 108-116, 2011.
  • Jitendra Singh, Sanjeev K Gupta, Satish Kumar and Jamil Akhtar “Ferroelectrics Tunable Microwave Device: Current Status”, ICMARS 2010.
  • Monika Poonia, Sumita Choudhari, Sheba Jamil, Anbalagan K, Sanjeev K. Gupta, Jitendra Singh and J. Akhtar “Realization of a novel polycrystalline diffused silicon resistors for MEMS applications” International Conference on Microwaves, Antenna, Propagation & Remote Sensing (ICMARS) 2010.
  • Jitendra Singh, Sanjeev K Gupta, Satish Kumar and Jamil Akhtar, “Ferroelectrics Tunable Microwave Device: Current Status”, Presented at International Conference on Microwaves, Antenna, Propagation and Remote Sensing (ICMARS-2010), December 14-17, 2010 at International Center for Radio Science (ICRS), Jodhpur, India [Oral].
  • Monika Poonia, Sumita Choudhari, Sheba Jamil, Anbalagan K, Sanjeev K. Gupta, Jitendra Singh and J. Akhtar,” Realization of a novel polycrystalline diffused silicon resistors for MEMS applications”, Presented at International Conference on Microwave Antenna and Remote Sensing (ICMARS-2010), December 14-17, 2010 International Center for Radio Science (ICRS), Jodhpur, India [Poster].
  • Jitendra Singh, and S. B. Krupanidhi, Bi1.5Zn1.0Nb1.5O7 (BZN) thin film based tunable microstrip phase shifter for microwave applications, IWPSD 2009. (Best poster award)
  • Aditi, R Mukhiya, Ram Gopal, V K Khanna, “FEM simulation of CMUT cell for NDT application”, IWPSD-2011, 19-22 December, 2011, IIT, Kanpur, India.
  • R Mukhiya, V. K. Khanna and T. K. Bhattacharyya, “FEM Simulations of Squeeze Film Damping of Bulk Micromachined Accelerometer”, International Conference on Nano Sensors and Technology, ICNST-10, October 28-30, 2010, CSIO, Chandigarh, India.
  • R Mukhiya, T. Praveen Singh and T. K. Bhattacharyya, “Design and Simulation of Bulk Micromachined Differential Capacitive In Plane Accelerometer for Vibration Sensing”, International Conference on Vibration Problems, ICoVP-09, January 19-22, 2009, IIT Kharagpur, India.
  • R Mukhiya, B. Pramanick and T. K. Bhattacharyya, “Fabrication of Silicon (100) Microstructures using TMAH”, International Conference on MEMS, ICMEMS-09, January 3-7, 2009, IIT Madras, India.