Smart Sensors

Process Technologies

Completed Projects

  1. Design and Development of Robust Vibratory MEMS Gyroscope by CSIR 2012-17.
  2. Design and Development of MEMS Gyro-Accelerometer by CSIR 2012-17.
  3. Design and Development of MEMS Technology based Gyroscope by ADA 2009-12.
  4. Design and Development of MEMS Pressure Sensor by CSIR 2012-17.
  5. Development of Ferroelectric Tunable Microwave Filters by CSIR 2012-17.
  6. Design and Development of MEMS Accelerometer by CSIR 2012-17.
  7. Development of MEMS gas sensor platform by CSIR 2012-17.
  8. Piezoelectric ZnO thin film development by CEERI 2012-13