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Semiconductor : Achievements in X Plan
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1. |
Design and development of MEMS capacitive pressure sensor
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2. |
Development of MEMS piezoresistive pressure sensor
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3. |
Design and development of acoustic based MEMS technology
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4. |
Design and fabrication of MEMS based ultrasonic transducer
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5. |
Development capabilities and facilities for MEMS and sensors
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6. |
Development of 980nm Laser Diode chip with 160 mW output power
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7. |
Development of 980 nm Laser Diode module using 14 Pin Butterfly Package with output power of 110mw
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| 8. | Establishment of Metal Organic Chemical Vapour Deposition for the epitaxial growth of III-V Compound Semiconductors |
9. |
Establishment of Silica on Silicon material technology by using PECVD system for Planar Lightwave Circuits |
10. |
Development of Silica on Silicon based 1 x 8 Optical Power Splitter packaged with input and output fibers
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11. |
Development of Silica on Silicon Arrayed Waveguide Grating based 8 x 8 Optical Multiplexer / Demultiplexer |
12. |
Synthesis of silicon nano particles
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13. |
Deposition and characterization of high k hafnium oxide dielectric thin films for scaled MOS devices
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14. |
Development of silicon carbide schottky diodes
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