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MEMS and Microsensors Group: Publications and Patents
 
Publications Peer reviewed/SCI Journal
International Conferences
National Conferences
Patent
 
Publications Peer reviewed/SCI Journal:
   
  Year 2008
   
1.
Anil Arora, Ram Gopal, V. K. Dwivedi, Chandra Shekhar, Babar Ahmad, Rudra Pratap and P. J. George, "Fabricating capacitive micromachined ultrasonic transducer with wafer bonding technique", Sensors and Transducers Journal, Vol. 93, Issue 6, pp 15-20, June 2008.
   
2.

Aarti Arora, P. J. George, Anil Arora, V. K. Dwivedi and Vinay Gupta, "Piezoelectric zinc oxide based MEMS acoustic sensor" , Sensors and Transducers, Vol 91, Issue 4, pp 70-75, April 2008.

   
3.

Aarti Arora, Anil Arora, V. K. Dwivedi, P. J. George, K. Sreenivas and Vinay Gupta, "Zinc oxide thin film based MEMS acoustic sensor with tunnel for pressure compensation", Sensors and Actuators A Vol. 141, Issue 2, pp.256-262, 2008.

 
4.
G. S. Virdi, R. K. Chutlani, P. K. Rao and Shushil Kumar, "Fabrication of low cost integrated micro-capillary electrophoresis analytical chip for chemical analysis", Sensors and actuators B, Volume 128, Issue 2, Pages 422-426, 2008.
   
  Year 2007
   
1.
B. D. Pant, Mahesh Kumar, Subha Lakshmi, Mahanth Prasad, Akshdeep Sharma, Mohan Patel, Radhakrishnan and V. K. Dwivedi, "Fabrication of MEMS composite-polymer gas sensor arrays for electronic nose", Indian Journal of Pure and Applied Physics, Vol. 45, pp 321-325, 2007.
   
2.
V. K. Khanna, Mahanth Prasad, V. K. Dwivedi, Chandra Shekhar, A. C. Pankaj and J. Basu, "Design and electro-thermal simulation of a polysilicon microheater on a suspended membrane for use in gas sensing", Indian Journal of Pure and Applied Physics, Vol. 45, pp 332-335, 2007.
   
3.

Mahesh Kumar, Mahanth Prasad, Niranjana Goswami, Anil Arora, B. D. Pant and V. K. Dwivedi, "Deposition of low stress polysilicon thin films using low pressure chemical vapour deposition", Indian Journal of Pure and Applied Physics, Vol. 45, pp 400-402, 2007.

 
4. V. K. Khanna, "Advances in chemical sensors, biosensors and microsystems based on ion-sensitive field-effect transistor", Indian Journal of Pure and Applied Physics, vol 45, 345-352, 2007.
 
5.
V. K. Khanna, S. Ahmad, Y. K. Jain, M. Jayalakshmi, S. Vanaja, S. S. Madhavendra, S. V. Manorama and M. Lakshmi Kantam, "Development of potassium-selective ion-sensitive field-effect transistor (ISFET) by depositing ionophoric crown ether membrane on the gate dielectric, and its application to the determination of K+-ion concentrations in blood serum", Indian Journal of Engineering and Materials Sciences, vol 14, 112-118, 2007.
 
6. V. K. Khanna, "pH measurement of dirty water sources by ISFET: Addressing practical problems", Sensor Review, Vol 27, 233-238, 2007.
 
Year 2006
 
1.
V. K. Khanna, A. Kumar, Y. K. Jain and S. Ahmad, "Design and development of a novel high-transconductance pH-ISFET (ion-sensitive field-effect transistor)-based glucose biosensor", International Journal of Electronics, Vol 93, 81- 96, 2006.
   
Year 2000
   
1.
V. K. Dwivedi, R. Gopal and S. Ahmad, "Fabrication of very smooth walls and bottoms of silicon microchannels for heat dissipation of semiconductor devices", Microelectronics Journal, Vol.31, No.6, pp.405-410, June 9, 2000.(U.K.)
   
   
Year 1998
   
1. R. Gopal and S. Ahmad, "Effect of proton-induced damage on the performance of enhancement mode MOSFET", Phys. Stat.Sol.(a), Vol. 168, pp.129-141, 1998(Germany).
   
Year 1995
   
1. S. Ahmad, A. S. V. Sarma, J. Akhtar, R. Gopal, I. Ahmad and M. Kumar, "Batch fabrication of millimeter-wave impacts", J. IETE,41, pp.71-75(1995).
   
Year 1993
   
1. V. K. Dwivedi, N. B. Singh, D. Pyne, S. Johri and G. S. Virdi, "Process integration, architecture and simulation of a GHz BiCMOS ULSI technology", Microelectronics Journal, vol. 24, No. 7, pp 773-785, 1993 (U.K.).
   
2. Arti Vishnoi, R. Gopal, R. Dwivedi and S. K. Srivastava, "Distributed parameters analysis of dark I-V characteristics of solar cell : estimation of equivalent lumped series resistance and diode quality factor", IEE Proceedings-G, vol. 140, p.155(1993).(U.K.).
   
3. R. Gopal and S. Ahmad, "On the carrier removal phenomena in silicon after proton irradiation", Solid-st. Electron, vol-36, p.1011 (1993), (U.K.).
   
4. S. Ahmad, J. Akhtar, A. S. V. Sarma, R. Gopal, I. Ahmad and M. Kumar , "Silicon mm-wave Impacts", IETE Techni. Rev. vol.10, p.341(1993).(India).
   
Year 1990
   
1. V. K. Dwivedi, N. B. Singh, S. Johri and K. K. Pande, "Process architecture and simulation of A BiCMOS IC technology", IETE Journal (Special Issue On Microelectronics), vol. 36, Nos. 3 and 4, pp 156-162, 1990. (INDIA).
   
2. V. K. Dwivedi, "A bird's free sealed interface local oxidation (SILO) isolation technology for submicron ultra large scale integrated circuits", J. Electrochem. Soc., vol. 137, no. 8, pp 2586-2588, 1990. (USA).
   
3. Arti Vishnoi, R. Gopal, R. Dwivedi and S. K. Srivastava, "Measurement of minority carrier lifetime of solar cells using surface voltage and current transients", Solid-St. Electron, vol-33, p.411 (1990), (U.K.).
   
4. A. K. Sharma, R. Gopal, R. Dwivedi and S. K. Srivastava, "Modified lumped series resistance model of solar cells under shadow conditions", Solid-St. Electron, vol-33, p.309 (1990), (U.K.).
   
Year 1989
   
1. O. P. Wadhawan, V. K. Dwivedi, S. Johri, "Fabrication of a custom designed telephone exchange microchip", et.al, IETE Technical Review, vol. 6, No. 2, March/ April 1989. (India).
   
2. Arti Vishnoi, R. Gopal, R. Dwivedi and S. K. Srivastava, "Combined effect of non uniform illumination and surface resistance on the performance of a solar cell", Int. J. Electron, vol-66, p.755 (1989). (U.K.).
   
3. Arti Vishnoi, R. Gopal, R. Dwivedi and S. K. Srivastava, "Studies of surface voltage and current transients in solar cells for accurate evaluation of minority carrier lifetime", Solid-St. Electron, vol.32, p.17 (1989), (U.K.).
   
4. A. K. Sharma, R. Gopal, R. Dwivedi and S. K. Srivastava, "Performance analysis of deuterium ion implanted polycrystalline silicon solar cell", Solar and wind Tech., vol.6, p.713 (1989), (U.S.A.).
   
Year 1988
   
1. V. K. Dwivedi, S. Johri, S. Gupta, G. S. Virdi and W. S. Khokle, "Fabrication of a NMOS custom "Subscriber chip" for a telephone exchange", Microelectronics Journal, vol. 19, No. 2, pp 36-41, March/Aril 1988. (UK).
   
2. G. S. Virdi, S. Gupta, V. K. Dwivedi and W. S. Khokle, "The development of a fully implated 3 micron poly gate NMOS techology (part 2)", Microelectronics Journal, vol. 19, No. 5, pp 5-10, 1988. (UK).
   
3. Ruby Agrawal, R. Gopal, R. Dwivedi and S. K. Srivastava, "Analytical modelling of MOSFET with non-uniform impurity profile", Physica Status Solidi, vol-108, p.803 (1988), (U.K).
   
Year 1986
   
1.
V. K. Dwivedi, G. S. Virdi, S. Gupta and W. S. Khokle, "The development of a fuly implanted 3 micron poly gate NMOS techology (part 1)", Microelectroics Journal, vol. 18, No.1, pp 29-33, 1986. (UK).
   
2.
R. Gopal, R. Dwivedi, and S. K. Srivastava, "Effect of non-uniform illumination on photovoltaic decay characteristic of solar cells", IEEE Trans. Electron Devices, vol. ED-33, p. 802 (1986), (U.S.A.).
   
Year 1985
   
1. O. P. Wadhawan, A. Srivastava, V. K. Dwivedi, "On the development of poly gate NMOS technology", et. al, Microelectronics Reliability, vol.25, No.3, pp 437-445, 1985. (USA).
   
2.

R. Gopal, R. Dwivedi and S. K. Srivastava, "Open-circuit voltage decay behavior in p-n junction diode at high injection", J. Appl. Phys., vol.58, p.3476 (1985). (U.S.A.).

   
3. R. K. Singh , R. Gopal, R. Dwivedi and S. K. Srivastava, "Asimpler technique for fabrication of metal-insulator-semiconductor (MIS) silicon solar cell", Ind. J. Pure and Appl. Phys., vol-23, p.48 (1985), (India).
   
Year 1983
   
1.

R. Gopal, R. Dwivedi and S. K. Srivastava, "Theoretical investigations of experimentally observed open-circuit voltage decay (OCVD) curves", Solid-St. Electron, vol.26, p.1101(1983), (U.K.).

   
Year 1980
   
1.
R. Gopal and P. C. Mishra, "Green's function calculation on photoelectron spectra of some small hetro-atomic n-electron systems", Ind. J. Pure and Appl. Phys., vol-18, p.917 (1980), (India).
   
International Conferences
   
  Year 2007
   
1. V. K. Khanna, Mahanth Prasad, V. K. Dwivedi, Chandra Shekhar, M. K. Sharma and Subha Lakshmi, "Milliwatt-power hotplates for metal-oxide gas sensors fabricated by MEMS technology", Proc. of the International Conf. on Emerging Mechanical Technology - Macro to Nano (EMTM2N)-2007, pp.126-132, BITS Pilani.
   
2. B. D. Pant, V. K. Dwivedi, Chandra Shekhar, "MEMS microcantilever based physical, chemical and biosensors", Proc. of the International Conf. on Emerging Mechanical Technology - Macro to Nano (EMTM2N)-2007, pp91-99, BITS Pilani.
   
  Year 2005
   
1. Anil Arora, Mahesh Kumar, V. K. Dwivedi and Aarti Arora, "Recipe of polysilicon thin film deposition using LPCVD", International Conference PWS and WYP-2005.
   
2. Mahesh Kumar, Anil Arora, V. K. Dwivedi and Aarti Arora, "Recipe of silicon nitride using LPCVD", International Conference PWS and WYP-2005.
   
3. Aarti Arora, Anil Arora, V. K. Dwivedi and P. J. George, "Deposition of ZnO films by MOCVD-"A Review", International Conference PWS and WYP-2005.
   
  Year 2003
   
1. S. Ahmad, V. K. Dwivedi, R. Gopal, and M. K. Sharma, "Batch fabrication of MEMS silicon pressure sensor", Proceeding IEEE Symposium on Microelectronics (NSM 2003), pp 283-285, 2003.
   
  Year 2001
   
1. V. K. Dwivedi, R. Gopal, M. Kumar and S. Ahmad, "Thin silicon diaphragm formation by micromachining of (100) silicon for micro-electro-mechanical sensors", SPIE international Symposium on MICRO/MEMS 2001, 17-19, Adelaide.
   
  Year 1996
   
1.
S. Ahmad and V. K. Dwivedi, "Anisotropic chemical etching of silicon", Proceedings of SPIE on Smart Materials, Structures, and MEMS, Vol. 3321, pp. 240-242, December 1996.
   
2.
S. Ahmad, R. Gopal, M. Mitra, V. K. Dwivedi and M. Kumar, "Glass to silicon anodic bonding", Proceedings of SPIE on Smart Materials, Structures, and MEMS, Vol. 3321, pp. 231-232, 1996.
   
  Year 1991
   
1.
D. Pyne, S. Johri and G. S. Virdi, V. K. Dwivedi, N. B. Singh, "Process integration, architecture and simulation of a submicron GHz BiCMOS technology", Proc. VIth IWPSD, pp 636-638, Dec. 2-6, 1991. (New Delhi, India).
   
2.
D. Pyne and V. K. Dwivedi, "Modelling the early voltage of poly silicon emitter bipolar transistor in submicron range", Proc.VIth IWPSD, pp 655-657, Dec. 2-6, 1991. (New Delhi, India).
   
  Year 1984
   
1.
O. P. Wadhawan, P. N. Andhare, V. K. Dwivedi, "Fabrications of 8 bit binary counter circuit", proceedings of National Symposiuon MICCASP, et. al, pp E25-E29, December 17-18, 1984, held in OSMANIA University, Hyderabad (India).
   
National Conferences
   
  Year 2007
   
1. Anil Arora, Ram Gopal, Mahesh Kumar, B. D. Pant, V. K. Dwivedi, Chandra Shekhar, Babar Ahmad, Rudra Pratap and P. J. George, "Fabrication of capacitive micromachined ultrasonic transducers with wafer bonding technique", ISSS-MEMS 2007, CEERI, Pilani, 16-17 November 2007.
 
2. B. D. Pant, Manjit Singh, Subha Laxmi, Mahesh Kumar and V. K. Dwivedi, "Development and characterization of deep reactive ion etchingtTechnology for the fabrication of MEMS micro-devices",ISSS-MEMS 2007, CEERI, Pilani, 16-17 November 2007.
 
3. Aarti Arora, V. K. Dwivedi, P. J. George, Anil Arora and Vinay Gupta, "Influence of post deposition annealing on electrical properties of RF sputtered zinc oxide thin film in forming gas", ISSS-MEMS 2007, CEERI,Pilani, 16-17 November 2007.
 
4. Mahanth Prasad, V. K. Khanna, M. K. Sharma, Subha Laxmi, Ram Gopal and V. K. Dwivedi, "Thermal characterization of polysilicon microheater fabricated on bulk- micromachined hotplate", ISSS-MEMS 2007, CEERI, Pilani, 16-17 November 2007.
 
5. M. Santosh, Mahesh Kumar, V. K. Dwivedi, "Optimization of oxidation process for MEMS application", ISSS-MEMS 2007, CEERI, Pilani, 16-17 November 2007.
 
6. B. D. Pant, Akshdeep Sharma, Subha Laxmi, Mahesh Kumar, Mahanth Prasad, Anil Arora, Ram Gopal, V. K. Dwivedi and Chandra Shekhar, "MEMS Micro-cantilevers: The next generation sensing elements", ISSS-MEMS 2007, CEERI, Pilani, 16-17 November 2007.
 
7.
Mahanth Prasad, V. K. Khanna, V. K. Dwivedi, "Design of Pt-based microhotplate and simulation of its temperature distribution with applied voltage", ISSS-MEMS 2007, CEERI, Pilani, 16-17 November 2007.
 
8.
M. Santosh, Mahesh Kumar, V. K. Dwivedi, "Optimization of phosphorous diffusion process on six inch silicon wafers for MEMS application", ISSS-MEMS 2007, CEERI, Pilani, 16-17 November 2007.
 
9.
B. D. Pant, Arun Verma, Akshdeep Sharma and V. K. Dwivedi, "Design and simulation of MEMS micro-needles for biomedical applications", ISSS-MEMS 2007, CEERI, Pilani, 16-17 November 2007.
 
10.
Sharvan Pahuja, Arti Arora, Sneh Anand, V. K. Dwivedi and Chandra Shekhar, "Real-time monitoring of mechanical vibration of human heart using MEMS acoustic sensor", ISSS-MEMS 2007, CEERI, Pilani, 16-17 November 2007.
 
11.
Shravan Pahuja, Sneh Anand, V. K. Dwivedi and Chandra Shekhar, "Real time monitoring of the fetus movement and measurement of uterine contraction using MEMS acoustic sensor", MEMS Innovation Fest-2007, 9-10 December 2007, pp 112-11.
 
12.
Mahanth Prasad, V. K. Khanna, V. K. Dwivedi, "Study of platinum lift-off process and fabrication of microhot plate array for gas sensing application", 52nd Proceeding of the DAE Solid State Physics Symposium 2007, December 27-31, University of Mysore, pp 407-408.
   
  Year 2006
   
1. Aarti Arora, Anil Arora, V. K. Dwivedi, P. J. George, "Fabrication of MEMS based piezoelectric acoustic sensor", IMS 2006, Kurukshetra University Kurukshetra, 2006.
   
2. Aarti Arora, Anil Arora, V. K. Dwivedi, P. J. George, K. Sreenivas, Vinay Gupta, "Zinc oxide thin film based MEMS acoustic sensor", Indo-Japan Workshop, South Campus, Delhi University, Delhi, December 18-20, 2006.
   
3. A. K. Sharma, R. K. Sharma, H. D Sharma, B. D. Pant and V. Srivastava, "Micro-fabrication techniques for modern high frequency devices", VEDA-2006, Oct 11-13, 2006, CEERI, Pilani.
   
4. Aarti Arora, Anil Arora, V. K. Dwivedi, P. J. George, "Fabrication of MEMS based piezoelectric acoustic sensor", IMS 2006, Kurukshetra University Kurukshetra, 2006.
   
5. Aarti Arora, Anil Arora, V. K. Dwivedi, P. J. George, K. Sreenivas, Vinay Gupta, "Zinc oxide thin film based MEMS acoustic sensor", Indo-Japan Workshop, South Campus, Delhi University, Delhi, December 18-20, 2006.
   
6. Anil Arora, V. K. Dwivedi, Ram Gopal, B. D. Pant, M. K. Sharma, Mahanth Prasad, Subha Lakshmi, Sunil Kumar, Arti Arora, "Fabrication of MEMS ultrasonic transducer for non destructivet testing", National Conference on Smart Structures and MEMS Systems for Aerospace Applications, ISSS-MEMS 2006, RCI - Hyderabad, December 1-2, 2006.
   
7. Aarti Arora, Anil Arora, V. K. Dwivedi, P. J. George, "Fabrication of MEMS based piezoelectric acoustic sensor", IMS 2006, Kurukshetra University Kurukshetra, 2006.
   
8. Aarti Arora, Anil Arora, V. K. Dwivedi, P. J. George, K. Sreenivas, Vinay Gupta, "Zinc oxide thin film based MEMS acoustic sensor", Indo-Japan Workshop, South Campus, Delhi University, Delhi, December 18-20, 2006.
   
9. B. D. Pant, V. K. Dwivedi, R. Gopal, Akshdeep Sharma, Mahesh Kumar, Subha Lakshmi, Mahanth Prasad, Anil Arora, Sunil Kumar, Mohan Patel, P. J. George, S. Ahmad and Chandrashekhar, "Fabrication of MEMS cantilever based micro-accelerometer for space applications", National Conference on Smart structures and MEMS systems for aerospace application, ISSS-MEMS 2006, RCI-Hyderabad, December 1-2, 2006.
   
  Year 2005
   
1. G. S. Virdi, "Lab on a chip", Presented in National conference on Sensors (NCS-2005), Nov 25-26, 2005, TIET, Patiala.
   
  Year 2004
   
1.
Anil Arora, Aarti Arora, V. K. Dwivedi and P. J. George, "MEMS devices for non destructive testing (NDT) and in-service inspection", HMPP -2004, RPA National Conference, pp. 68-70. 2004.
   
2.
Aarti Arora, Anil Arora and V. K. Dwivedi, "Silicon microstructures for MEMS based load cel", HMPP-2004, RPA National Conference, 75-79, 2004.
   
Patent:
   
  Granted
1. "An Improved Process For The Fabrication Of Smooth Vertical Side Walled Deep Trenches In (110) Silocon",
Inventors: V. K. Dwivedi and S. Ahmad
Indian Patent No.: 2520/DEL/98.
   
  Filed
1. "A Process for the Manufacture of Ion-Sensitive Field-Effect Transistor (ISFET) with A High Aspect Ratio and ISFET Made Thereby, Leading to Fabrication of Sensors with Enhanced Performance for Chemical and Biological Applications".
Inventors: V. K. Khanna, S. Ahmad, A. Kumar and Y. K. Jain
Patent Application No.: 0257DEL2006, Date of filing: 31st January 2006.
   
2. "A Method of Manufacturing Piezoelectric Acoustic Sensors and Piezoelectric Acoustic Sensors",
Inventors: V. K. Dwivedi and Aarti Arora.
Patent Application No.: 0026NF2007.
   
3.
"Novel Diazonaphthoquinone Sulfonic Acid Bisphenol Derivative Useful in Photolithographic Sub Micron Patterning And A Process For Preparation Thereof"
Inventors: V. V. Reddy, V. J. Rao, M. L. Kantam, S. S. Madhavendra (IICT, Hyderabad) and V. K. Dwivedi (CEERI, Pilani)
International Application No.: PCT/IN2008/000169.
   

   
 
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